Inventor · disambiguated record
Declan Scanlan
Also filed as: SCANLAN DECLAN
2 granted patents·4 pending applications·15 citations·filing 2006–2022
51Inventor score
Top patents by PatentIndex Score
6 records- 0182US8475625B2Apparatus for etching high aspect ratio featuresPAMARTHY SHARMA·Filed 2006·Granted Jul 2, 2013·15 cites·22 claims
- 0249US12394638B2Fluid routing for a vacuum pumping systemEDWARDS LTD·Filed 2022·Granted Aug 19, 2025·0 cites·14 claims
- 0342US2010099266A1Etch reactor suitable for etching high aspect ratio featuresAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 0439US2022238354A1Multiple vacuum chamber exhaust system and method of evacuating multiple chambersEDWARDS VACUUM LLC·Filed 2020·Application pending·0 cites
- 0537US2022243737A1Vacuum assembly and vacuum pump with an axial through passageEDWARDS LTD·Filed 2020·Application pending·0 cites
- 0637US2020251357A1Method and apparatus for supplying gas to a chuckEDWARDS LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →