Inventor · disambiguated record
Dezheng Sun
Also filed as: SUN DEZHENG
1 granted patent·4 pending applications·0 citations·filing 2019–2023
10Inventor score
Files withASML NETHERLANDS BV5
Top patents by PatentIndex Score
5 records- 0154US11846889B2Method and apparatus for diffraction pattern guided source mask optimizationASML NETHERLANDS BV·Filed 2020·Granted Dec 19, 2023·0 cites·20 claims
- 0253US2025264808A1Diffraction-based pupil determination for optimization of lithographic processesASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0350US2024319581A1Match the aberration sensitivity of the metrology mark and the device patternASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0448US2025028298A1Thermal control systems, models, and manufacturing processes in lithographyASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0541US2020380362A1Methods for training machine learning model for computation lithographyASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →