Inventor · disambiguated record
Dengfeng Xu
Also filed as: XU DENGFENG
29 granted patents·5 pending applications·281 citations·filing 2001–2020
95Inventor score
Top patents by PatentIndex Score
34 records- 0198US7595350B2Ultraporous sol gel monolithsVARIAN INC·Filed 2008·Granted Sep 29, 2009·67 cites·2 claims
- 0297US7651762B2Methods and devices using a shrinkable support for porous monolithic materialsVARIAN INC·Filed 2007·Granted Jan 26, 2010·68 cites·24 claims
- 0396US7439272B2Ultraporous sol gel monolithsVARIAN INC·Filed 2004·Granted Oct 21, 2008·90 cites·21 claims
- 0481US6884822B2Sol-gel process utilizing reduced mixing temperaturesSIMAX TECHNOLOGIES INC·Filed 2002·Granted Apr 26, 2005·20 cites·14 claims
- 0573US9879979B2Heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2013·Granted Jan 30, 2018·4 cites·9 claims
- 0672US12270645B2High-resolution phase detection method and system based on plane grating laser interferometerUNIV TSINGHUA·Filed 2020·Granted Apr 8, 2025·1 cites·6 claims
- 0769US10532832B2Magnetic levitation reaction sphereUNIV TSINGHUA·Filed 2016·Granted Jan 14, 2020·2 cites·4 claims
- 0869US7026362B2Sol-gel process utilizing reduced mixing temperaturesSIMAX TECHNOLOGIES INC·Filed 2001·Granted Apr 11, 2006·9 cites·36 claims
- 0968US11590260B2Methods for treating bioprosthetic tissue using a nucleophile/electrophile in a catalytic systemEDWARDS LIFESCIENCES CORP·Filed 2019·Granted Feb 28, 2023·0 cites·9 claims
- 1066US8284380B2Dual-stage switching system for lithographic machineZHU YU·Filed 2008·Granted Oct 9, 2012·2 cites·5 claims
- 1166US8084897B2Micro stage with 6 degrees of freedomZHU YU·Filed 2008·Granted Dec 27, 2011·2 cites·1 claims
- 1265US7125912B2Doped sol-gel materials and method of manufacture utilizing reduced mixing temperaturesSIMAX TECHNOLOGIES INC·Filed 2002·Granted Oct 24, 2006·9 cites·36 claims
- 1363US9903704B2Three-DOF heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Granted Feb 27, 2018·2 cites·6 claims
- 1459US10238771B2Methods for treating bioprosthetic tissue using a nucleophile/electrophile in a catalytic systemEDWARDS LIFESCIENCES CORP·Filed 2013·Granted Mar 26, 2019·0 cites·17 claims
- 1557US9885556B2Dual-frequency grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2013·Granted Feb 6, 2018·1 cites·8 claims
- 1656US9752643B2Negative stiffness system for gravity compensation of micropositionerSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Sep 5, 2017·1 cites·3 claims
- 1748US9869857B2Optical grating phase modulator for laser interference photoetching systemUNIV TSINGHUA·Filed 2014·Granted Jan 16, 2018·0 cites·4 claims
- 1848US7000885B2Apparatus and method for forming a sol-gel monolith utilizing multiple castingSIMAX TECHNOLOGIES INC·Filed 2002·Granted Feb 21, 2006·3 cites·26 claims
- 1946US2004194511A1Sol-gel-derived halogen-doped glassFiled 2004·Application pending·0 cites
- 2044US2015326150A1Maglev workpiece table with six degrees of freedomUNIV TSINGHUA·Filed 2013·Application pending·0 cites
- 2144US2006083914A1Sol-gel process utilizing reduced mixing temperaturesWANG SHIHO·Filed 2005·Application pending·0 cites
- 2243US9310797B2Single degree of freedom vibration isolating device of linear motor and motion control method thereofUNIV TSINGHUA·Filed 2013·Granted Apr 12, 2016·0 cites·6 claims
- 2342US9182217B2Method for measuring displacement of large-range moving platformUNIV TSINGHUA·Filed 2013·Granted Nov 10, 2015·0 cites·5 claims
- 2442US8958078B2Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in spaceZHANG MING·Filed 2012·Granted Feb 17, 2015·0 cites·2 claims
- 2542US2016138903A1Two-dof heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Application pending·0 cites
- 2641US2015311099A1Wafer Stage Having Function of Anti-CollisionSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Application pending·0 cites
- 2740US9766054B2Planar motor rotor displacement measuring device and its measuring methodSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Sep 19, 2017·0 cites·3 claims
- 2840US9547245B2Dual wafer stage switching system for a lithography machineZHU YU·Filed 2012·Granted Jan 17, 2017·0 cites·5 claims
- 2940US9310782B2Method for measuring displacement of planar motor rotorSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Apr 12, 2016·0 cites·3 claims
- 3035US9030648B2Dual wafer stage exchanging system for lithographic deviceZHU YU·Filed 2010·Granted May 12, 2015·0 cites·4 claims
- 3135US8860927B2Dual-stage exchange system for lithographic apparatusZHU YU·Filed 2010·Granted Oct 14, 2014·0 cites·4 claims
- 3235US8836918B2Dual-stage exchange system for lithographic apparatusZHU YU·Filed 2010·Granted Sep 16, 2014·0 cites·6 claims
- 3333US9995569B2Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stageUNIV TSINGHUA·Filed 2016·Granted Jun 12, 2018·0 cites·1 claims
- 3430US9455650B2Two-dimensional locating method of motion platform based on magnetic steel arrayHU JINCHUN·Filed 2011·Granted Sep 27, 2016·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →