Inventor · disambiguated record
Dietmar Duerr
Also filed as: DUERR DIETMAR
0 granted patents·4 pending applications·0 citations·filing 2021–2025
Files withZEISS CARL SMT GMBH4
Top patents by PatentIndex Score
4 records- 0155US2024085800A1Projection exposure apparatus and method for designing a component of a projection exposure apparatusZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0252US2025306479A1Optical system and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0352US2025208523A1Bipod, optical system and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0435US2021255554A1Module for a projection exposure apparatus for semiconductor lithography with a semi-active spacer, and method for using the semi-active spacerZEISS CARL SMT GMBH·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →