Inventor · disambiguated record
Diana L. Hackenberg
Also filed as: HACKENBERG DIANA L · HACKENBERG DIANA LYNN
3 granted patents·2 pending applications·85 citations·filing 1992–2003
74Inventor score
Top patents by PatentIndex Score
5 records- 0174US5932022ASC-2 based pre-thermal treatment wafer cleaning processHARRIS CORP·Filed 1998·Granted Aug 3, 1999·51 cites·3 claims
- 0258US5237878AApparatus and method for sampling ultra-pure chemicalSEMATECH INC·Filed 1992·Granted Aug 24, 1993·26 cites·9 claims
- 0338US6526995B1Brushless multipass silicon wafer cleaning process for post chemical mechanical polishing using immersionINTERSIL INC·Filed 1999·Granted Mar 4, 2003·8 cites·18 claims
- 0436US2003121528A1Brushless multipass silicon wafer cleaning process for post chemical mechanical polishing using immersionINTERSIL INC·Filed 2003·Application pending·0 cites
- 0522US2002189640A1Sc-2 based pre-thermal treatment wafer cleaning processFiled 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →