Inventor · disambiguated record
Dieter Hezler
Also filed as: Hezler Dieter
13 granted patents·5 pending applications·5 citations·filing 2016–2025
84Inventor score
Top patents by PatentIndex Score
18 records- 0188US12068177B2Rapid thermal processing system with cooling systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Aug 20, 2024·2 cites·11 claims
- 0285US2025379073A1Workpiece Processing Apparatus with Thermal Processing SystemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
- 0384US11955315B2Workpiece processing apparatus with plasma and thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Apr 9, 2024·2 cites·20 claims
- 0479US12412758B2Workpiece processing apparatus with thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Granted Sep 9, 2025·0 cites·8 claims
- 0575US12119216B2Arc lamp with forming gas for thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Oct 15, 2024·0 cites·24 claims
- 0673US2025314267A1Workpiece Support For A Thermal Processing SystemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
- 0770US12183558B2Workpiece processing apparatus with thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Dec 31, 2024·0 cites·14 claims
- 0870US12046489B2Workpiece processing apparatus with thermal processing systemsMATTSON TECH INC·Filed 2021·Granted Jul 23, 2024·0 cites·12 claims
- 0970US2024379390A1Rapid Thermal Processing System With Cooling SystemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
- 1069US12442078B2Workpiece processing apparatus with gas showerhead assemblyMATTSON TECH INC·Filed 2021·Granted Oct 14, 2025·0 cites·14 claims
- 1169US12308209B2Workpiece processing apparatus with plasma and thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Granted May 20, 2025·0 cites·15 claims
- 1268US11721539B2Arc lamp with forming gas for thermal processing systemsMATTSON TECH INC·Filed 2021·Granted Aug 8, 2023·0 cites·14 claims
- 1366US10359334B2Fluid leakage detection for a millisecond anneal systemMATTSON TECH INC·Filed 2016·Granted Jul 23, 2019·1 cites·17 claims
- 1465US12352306B2Workpiece support for a thermal processing systemMATTSON TECH INC·Filed 2021·Granted Jul 8, 2025·0 cites·15 claims
- 1559US11837447B2Workpiece processing apparatus with plasma and thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Dec 5, 2023·0 cites·20 claims
- 1659US2025216154A1Thermal processing system for processing workpiecesBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
- 1758US2025167008A1Gas delivery system for a thermal processing apparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
- 1850US12362194B2Rapid thermal processing system with cooling systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Jul 15, 2025·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →