Inventor · disambiguated record
Diwakar Kedlaya
Also filed as: KEDLAYA DIWAKAR · KEDLAYA DIWAKAR N
29 granted patents·19 pending applications·17 citations·filing 2007–2024
93Inventor score
Top patents by PatentIndex Score
48 records- 0194US11527408B2Multiple spacer patterning schemesAPPLIED MATERIALS INC·Filed 2020·Granted Dec 13, 2022·4 cites·8 claims
- 0292US11618949B2Methods to reduce material surface roughnessAPPLIED MATERIALS INC·Filed 2020·Granted Apr 4, 2023·2 cites·20 claims
- 0389US11495483B2Backside gas leakby for bevel deposition reductionAPPLIED MATERIALS INC·Filed 2020·Granted Nov 8, 2022·2 cites·20 claims
- 0482US12205818B2Boron concentration tunability in boron-silicon filmsAPPLIED MATERIALS INC·Filed 2024·Granted Jan 21, 2025·0 cites·18 claims
- 0582US11939674B2Methods to reduce material surface roughnessAPPLIED MATERIALS INC·Filed 2023·Granted Mar 26, 2024·0 cites·20 claims
- 0679US12062567B2Systems and methods for substrate support temperature controlAPPLIED MATERIALS INC·Filed 2020·Granted Aug 13, 2024·1 cites·14 claims
- 0779US2025112046A1Boron concentration tunability in boron-silicon filmsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0877US12451345B2PECVD of SiBN thin films with low leakage currentAPPLIED MATERIALS INC·Filed 2024·Granted Oct 21, 2025·0 cites·20 claims
- 0977US11598004B2Lid assembly apparatus and methods for substrate processing chambersAPPLIED MATERIALS INC·Filed 2020·Granted Mar 7, 2023·1 cites·11 claims
- 1072US7795559B2Vacuum debris removal systemANVIK CORP·Filed 2007·Granted Sep 14, 2010·5 cites·6 claims
- 1170US11009455B2Precursor delivery system and methods related theretoAPPLIED MATERIALS INC·Filed 2019·Granted May 18, 2021·1 cites·17 claims
- 1270US10373823B2Deployment of light energy within specific spectral bands in specific sequences for deposition, treatment and removal of materialsAPPLIED MATERIALS INC·Filed 2018·Granted Aug 6, 2019·1 cites·20 claims
- 1370US2023093450A1Multiple spacer patterning schemesAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1469US11961739B2Boron concentration tunability in boron-silicon filmsAPPLIED MATERIALS INC·Filed 2020·Granted Apr 16, 2024·0 cites·8 claims
- 1569US2024079220A1Optical absorption sensor for semiconductor processingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1665US11315787B2Multiple spacer patterning schemesAPPLIED MATERIALS INC·Filed 2020·Granted Apr 26, 2022·0 cites·14 claims
- 1764US2023146981A1Hydrogen management in plasma deposited filmsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1861US11848178B2Optical absorption sensor for semiconductor processingAPPLIED MATERIALS INC·Filed 2020·Granted Dec 19, 2023·0 cites·8 claims
- 1961US11430641B1Processing systems and methods to control process driftAPPLIED MATERIALS INC·Filed 2021·Granted Aug 30, 2022·0 cites·18 claims
- 2061US2025308850A1Grounding plate for stress tuning high density and modulus filmsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2160US11562902B2Hydrogen management in plasma deposited filmsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 24, 2023·0 cites·17 claims
- 2257US2013109189A1System architecture for plasma processing solar wafersINTEVAC INC·Filed 2012·Application pending·0 cites
- 2356US12255054B2Methods to eliminate of deposition on wafer bevel and backsideAPPLIED MATERIALS INC·Filed 2020·Granted Mar 18, 2025·0 cites·17 claims
- 2456US11682544B2Cover wafer for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Jun 20, 2023·0 cites·19 claims
- 2556US2025230540A1Seam performance improvement for large area gapfillAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2654US11443919B2Film formation via pulsed RF plasmaAPPLIED MATERIALS INC·Filed 2020·Granted Sep 13, 2022·0 cites·16 claims
- 2754US2020211834A1Methods for forming films containing silicon boron with low leakage currentAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2854US2025066913A1Seam performance improvement using hydroxylation for gapfillAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2952US11532525B2Controlling concentration profiles for deposited films using machine learningAPPLIED MATERIALS INC·Filed 2021·Granted Dec 20, 2022·0 cites·20 claims
- 3051US2024387190A1Formation of silicon-and-metal-containing materials for hardmask applicationsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3151US2024234167A1Modular precursor delivery and splitting for fast switchingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3250US11830706B2Heated pedestal design for improved heat transfer and temperature uniformityAPPLIED MATERIALS INC·Filed 2019·Granted Nov 28, 2023·0 cites·19 claims
- 3349US10256005B2Rotating substrate laser annealAPPLIED MATERIALS INC·Filed 2016·Granted Apr 9, 2019·0 cites·20 claims
- 3448US11862475B2Gas mixer to enable RPS purgingAPPLIED MATERIALS INC·Filed 2020·Granted Jan 2, 2024·0 cites·17 claims
- 3548US2022093371A1Radiation shield for removing backside deposition at lift pin locationsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3648US2023023764A1Surface profiling and texturing of chamber componentsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3747US11798820B2Gas delivery systems and methodsAPPLIED MATERIALS INC·Filed 2020·Granted Oct 24, 2023·0 cites·20 claims
- 3847US2023033058A1Reactor with inductively coupled plasma sourceAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 3946US11810764B2Faceplate with edge flow controlAPPLIED MATERIALS INC·Filed 2020·Granted Nov 7, 2023·0 cites·20 claims
- 4046US2022108872A1Bevel backside deposition eliminationAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 4145US2021183657A1Surface profiling and texturing of chamber componentsAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 4244US11814716B2Faceplate having blocked center holeAPPLIED MATERIALS INC·Filed 2019·Granted Nov 14, 2023·0 cites·17 claims
- 4344US11804363B2Chamber components for gas delivery modulationAPPLIED MATERIALS INC·Filed 2020·Granted Oct 31, 2023·0 cites·14 claims
- 4444US11456173B2Methods for modifying photoresist profiles and tuning critical dimensionsAPPLIED MATERIALS INC·Filed 2020·Granted Sep 27, 2022·0 cites·19 claims
- 4543US10537965B2Fiber array line generatorAPPLIED MATERIALS INC·Filed 2014·Granted Jan 21, 2020·0 cites·14 claims
- 4643US2020043722A1Cvd based spacer deposition with zero loadingAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 4741US2013105087A1Solar wafer electrostatic chuckINTEVAC INC·Filed 2012·Application pending·0 cites
- 4841US2022108891A1Modular zone control for a processing chamberAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Diwakar Kedlaya files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →