Inventor · disambiguated record
Diana Xiabing Ma
Also filed as: MA DIANA X · MA DIANA XIABING
4 granted patents·1 pending application·242 citations·filing 1994–2004
82Inventor score
Technology areasH01J
Files withAPPLIED MATERIALS INC4
Top patents by PatentIndex Score
5 records- 0193US5753044ARF plasma reactor with hybrid conductor and multi-radius dome ceilingAPPLIED MATERIALS INC·Filed 1995·Granted May 19, 1998·91 cites·121 claims
- 0293US5540824APlasma reactor with multi-section RF coil and isolated conducting lidAPPLIED MATERIALS INC·Filed 1994·Granted Jul 30, 1996·85 cites·31 claims
- 0387US6270617B1RF plasma reactor with hybrid conductor and multi-radius dome ceilingAPPLIED MATERIALS INC·Filed 1997·Granted Aug 7, 2001·48 cites·49 claims
- 0483US6475335B1RF plasma reactor with hybrid conductor and multi-radius dome ceilingAPPLIED MATERIALS INC·Filed 2000·Granted Nov 5, 2002·18 cites·162 claims
- 0540US2005106873A1Plasma chamber having multiple RF source frequenciesFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →