Inventor · disambiguated record
Diana Urich
Also filed as: URICH DIANA
2 granted patents·1 citations·filing 2018–2019
31Inventor score
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0169US10649340B2Reflective optical element for EUV lithographyZEISS CARL SMT GMBH·Filed 2019·Granted May 12, 2020·1 cites·18 claims
- 0254US10712677B2Projection exposure system for semiconductor lithography, comprising elements for plasma conditioningZEISS CARL SMT GMBH·Filed 2018·Granted Jul 14, 2020·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →