Inventor · disambiguated record
Dmitry Shur
Also filed as: SHUR DMITRY
12 granted patents·59 citations·filing 2003–2021
88Inventor score
Files withAPPLIED MATERIALS ISRAEL LTD6EL MUL TECH LTD2KLA TENCOR CORP2EL MULTECHNOLOGIES LTD1SHUR DMITRY1
Top patents by PatentIndex Score
12 records- 0194US9214317B2System and method of SEM overlay metrologyKLA TENCOR CORP·Filed 2014·Granted Dec 15, 2015·23 cites·25 claims
- 0280US9442369B1Method and apparatus for lithographic mask productionKLA TENCOR CORP·Filed 2013·Granted Sep 13, 2016·3 cites·9 claims
- 0378US7279689B2Contact opening metrologyAPPLIED MATERIALS ISRAEL LTD·Filed 2005·Granted Oct 9, 2007·4 cites·19 claims
- 0477US11031210B2Charged particle detection systemEL MUL TECH LTD·Filed 2020·Granted Jun 8, 2021·1 cites·10 claims
- 0575US7038224B2Contact opening metrologyAPPLIED MATERIALS ISRAEL LTD·Filed 2003·Granted May 2, 2006·13 cites·71 claims
- 0666US7476875B2Contact opening metrologyAPPLIED MATERIALS ISRAEL LTD·Filed 2007·Granted Jan 13, 2009·1 cites·15 claims
- 0764US8546756B2System and method for material analysis of a microscopic elementSHUR DMITRY·Filed 2009·Granted Oct 1, 2013·2 cites·20 claims
- 0860US11322333B2Charged particle detection systemEL MULTECHNOLOGIES LTD·Filed 2021·Granted May 3, 2022·0 cites·10 claims
- 0958US7473911B2Specimen current mapperAPPLIED MATERIALS ISRAEL LTD·Filed 2003·Granted Jan 6, 2009·8 cites·27 claims
- 1051US7381978B2Contact opening metrologyAPPLIED MATERIALS ISRAEL LTD·Filed 2005·Granted Jun 3, 2008·0 cites·16 claims
- 1147US7602197B2High current electron beam inspectionAPPLIED MATERIALS ISRAEL LTD·Filed 2004·Granted Oct 13, 2009·4 cites·21 claims
- 1245US10910193B2Particle detection assembly, system and methodEL MUL TECH LTD·Filed 2019·Granted Feb 2, 2021·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →