Inventor · disambiguated record
Douglas E. Ruth
Also filed as: RUTH DOUGLAS E
4 granted patents·1 pending application·67 citations·filing 2000–2005
77Inventor score
Top patents by PatentIndex Score
5 records- 0189US6563586B1Wafer metrology apparatus and methodTHERMA WAVE INC·Filed 2000·Granted May 13, 2003·44 cites·25 claims
- 0277US7177019B2Apparatus for imaging metrologyTOKYO ELECTRON LTD·Filed 2005·Granted Feb 13, 2007·6 cites·16 claims
- 0364US7042580B1Apparatus for imaging metrologyTOKYO ELECTRON LTD·Filed 2000·Granted May 9, 2006·10 cites·15 claims
- 0463US6919958B2Wafer metrology apparatus and methodTHERMA WAVE INC·Filed 2003·Granted Jul 19, 2005·7 cites·3 claims
- 0539US2002018217A1Optical critical dimension metrology system integrated into semiconductor wafer process toolFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →