Inventor · disambiguated record
Duygu Akbulut
Also filed as: AKBULUT DUYGU
17 granted patents·2 pending applications·27 citations·filing 2016–2025
90Inventor score
Files withASML NETHERLANDS BV19
Top patents by PatentIndex Score
19 records- 0193US11262661B2Metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Mar 1, 2022·4 cites·18 claims
- 0291US10444640B2Metrology apparatus, lithographic system, and method of measuring a structureASML NETHERLANDS BV·Filed 2018·Granted Oct 15, 2019·4 cites·20 claims
- 0389US11940739B2Metrology apparatusASML NETHERLANDS BV·Filed 2021·Granted Mar 26, 2024·1 cites·19 claims
- 0489US10788766B2Metrology sensor, lithographic apparatus and method for manufacturing devicesASML NETHERLANDS BV·Filed 2018·Granted Sep 29, 2020·4 cites·19 claims
- 0583US10185224B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Jan 22, 2019·3 cites·20 claims
- 0683US10126659B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Nov 13, 2018·3 cites·20 claims
- 0780US10317808B2Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jun 11, 2019·3 cites·18 claims
- 0880US9927722B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Mar 27, 2018·2 cites·26 claims
- 0978US11086240B2Metrology sensor, lithographic apparatus and method for manufacturing devicesASML NETHERLANDS BV·Filed 2017·Granted Aug 10, 2021·2 cites·15 claims
- 1078US10234767B2Device and method for processing a radiation beam with coherenceASML NETHERLANDS BV·Filed 2017·Granted Mar 19, 2019·1 cites·19 claims
- 1166US2025253123A1Charged particle-optical apparatusASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 1261US10908514B2Metrology apparatus, lithographic system, and method of measuring a structureASML NETHERLANDS BV·Filed 2019·Granted Feb 2, 2021·0 cites·20 claims
- 1354US11333985B2Position sensorASML NETHERLANDS BV·Filed 2019·Granted May 17, 2022·0 cites·22 claims
- 1453US11927891B2Apparatus and methods for determining the position of a target structure on a substrateASML NETHERLANDS BV·Filed 2018·Granted Mar 12, 2024·0 cites·13 claims
- 1553US11042100B2Measurement apparatus and method of measuring a targetASML NETHERLANDS BV·Filed 2019·Granted Jun 22, 2021·0 cites·13 claims
- 1653US2024241452A1Metrology apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1744US10527959B2Position sensor, lithographic apparatus and method for manufacturing devicesASML NETHERLANDS BV·Filed 2017·Granted Jan 7, 2020·0 cites·20 claims
- 1841US11243470B2Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Feb 8, 2022·0 cites·26 claims
- 1939US9811001B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Nov 7, 2017·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →