Inventor · disambiguated record
Duming Zhang
Also filed as: ZHANG DUMING
5 granted patents·1 pending application·23 citations·filing 2017–2021
76Inventor score
Files withLAM RES CORP6
Top patents by PatentIndex Score
6 records- 0196US11211253B2Atomic layer deposition and etch in a single plasma chamber for critical dimension controlLAM RES CORP·Filed 2020·Granted Dec 28, 2021·8 cites·18 claims
- 0292US10734238B2Atomic layer deposition and etch in a single plasma chamber for critical dimension controlLAM RES CORP·Filed 2017·Granted Aug 4, 2020·10 cites·18 claims
- 0378US10950454B2Integrated atomic layer passivation in TCP etch chamber and in-situ etch-ALP methodLAM RES CORP·Filed 2017·Granted Mar 16, 2021·2 cites·16 claims
- 0478US10658174B2Atomic layer deposition and etch for reducing roughnessLAM RES CORP·Filed 2017·Granted May 19, 2020·3 cites·12 claims
- 0561US2021287909A1Integrated atomic layer passivation in tcp etch chamber and in-situ etch-alp methodLAM RES CORP·Filed 2021·Application pending·0 cites
- 0660US11170997B2Atomic layer deposition and etch for reducing roughnessLAM RES CORP·Filed 2020·Granted Nov 9, 2021·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →