Inventor · disambiguated record
Edward Barth
Also filed as: BARTH EDWARD · BARTH EDWARD P · BARTH EDWARD PAUL
6 granted patents·1 pending application·102 citations·filing 1999–2004
83Inventor score
Files withIBM6
Top patents by PatentIndex Score
7 records- 0188US6737747B2Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereofIBM·Filed 2002·Granted May 18, 2004·43 cites·13 claims
- 0283US6939797B2Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereofIBM·Filed 2003·Granted Sep 6, 2005·26 cites·20 claims
- 0377US7009280B2Low-k interlevel dielectric layer (ILD)IBM·Filed 2004·Granted Mar 7, 2006·15 cites·17 claims
- 0465US6849563B2Method and apparatus for controlling coating thicknessIBM·Filed 2002·Granted Feb 1, 2005·10 cites·9 claims
- 0558US6726996B2Laminated diffusion barrierIBM·Filed 2001·Granted Apr 27, 2004·8 cites·19 claims
- 0640US7034400B2Dual damascene interconnect structure using low stress fluorosilicate insulator with copper conductorsIBM·Filed 2003·Granted Apr 25, 2006·0 cites·12 claims
- 0729US2002076917A1Dual damascene interconnect structure using low stress flourosilicate insulator with copper conductorsFiled 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →