Inventor · disambiguated record
Edward Golubovsky
Also filed as: GOLUBOVSKY EDWARD
9 granted patents·9 pending applications·21 citations·filing 2005–2024
82Inventor score
Files withAPPLIED MATERIALS INC18
Top patents by PatentIndex Score
18 records- 0186US11749552B2Wafer processing tools and methods thereofAPPLIED MATERIALS INC·Filed 2020·Granted Sep 5, 2023·2 cites·14 claims
- 0281USD947802SReplaceable substrate carrier interfacing filmAPPLIED MATERIALS INC·Filed 2020·Granted Apr 5, 2022·11 cites·1 claims
- 0377US7713390B2Ground shield for a PVD chamberAPPLIED MATERIALS INC·Filed 2005·Granted May 11, 2010·6 cites·23 claims
- 0476US12142513B2Wafer processing tools and methods thereofAPPLIED MATERIALS INC·Filed 2023·Granted Nov 12, 2024·0 cites·20 claims
- 0576US11289347B2Non-contact clean moduleAPPLIED MATERIALS INC·Filed 2019·Granted Mar 29, 2022·2 cites·16 claims
- 0669US2025114902A1Horizontal pre-clean 2-stage downforce mechanism with flexureAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0768US2024100714A1Method and apparatus for processing a substrate in cleaning modulesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0867US2024100713A1Method and apparatus for processing a substrate in cleaning modulesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0966US12400892B2High throughput polishing modules and modular polishing systemsAPPLIED MATERIALS INC·Filed 2020·Granted Aug 26, 2025·0 cites·24 claims
- 1065US12394651B2High throughput polishing modules and modular polishing systemsAPPLIED MATERIALS INC·Filed 2020·Granted Aug 19, 2025·0 cites·20 claims
- 1161US11721563B2Non-contact clean moduleAPPLIED MATERIALS INC·Filed 2021·Granted Aug 8, 2023·0 cites·12 claims
- 1261US2021323117A1High throughput polishing modules and modular polishing systemsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1359US2022134505A1Horizontal buffing moduleAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1456US2024412985A1Dedicated sulfuric-peroxide process module for post-cmp cleaning platformsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1555US2024363371A1Substrate cleaning improvementAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1651US11942319B2Pad carrier for horizontal pre-clean moduleAPPLIED MATERIALS INC·Filed 2021·Granted Mar 26, 2024·0 cites·15 claims
- 1747US2010130107A1Method and apparatus for linear pad conditioningAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 1840US2020086453A1Non-contact rotary unionAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →