Inventor · disambiguated record
Edward Siqi Luo
Also filed as: LUO EDWARD SIQI
5 granted patents·4 pending applications·1 citations·filing 2018–2025
61Inventor score
Files withCymer LLC9
Top patents by PatentIndex Score
9 records- 0176US2025286337A1Conduit system, radiation source, lithographic apparatus, and methods thereofCymer LLC·Filed 2025·Application pending·0 cites
- 0271US11349273B2Apparatus for tuning discharge performance in a laser chamberCymer LLC·Filed 2018·Granted May 31, 2022·1 cites·29 claims
- 0365US12341314B2Conduit system, radiation source, lithographic apparatus, and methods thereofCymer LLC·Filed 2021·Granted Jun 24, 2025·0 cites·20 claims
- 0455US2025125572A1Electrode with engineered surface for improved energy performanceCymer LLC·Filed 2022·Application pending·0 cites
- 0555US2025216803A1Passive dust trap, illumination system, and lithography systemCymer LLC·Filed 2023·Application pending·0 cites
- 0653US11754541B2Fluorine detection in a gas discharge light sourceCymer LLC·Filed 2018·Granted Sep 12, 2023·0 cites·12 claims
- 0751US2023016894A1Undercut electrodes for a gas discharge laser chamberCymer LLC·Filed 2020·Application pending·0 cites
- 0841US11949203B2Gas management systemCymer LLC·Filed 2019·Granted Apr 2, 2024·0 cites·20 claims
- 0934US11949202B2Gas management systemCymer LLC·Filed 2018·Granted Apr 2, 2024·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →