Inventor · disambiguated record
Edwin Teunis Van Donkelaar
Also filed as: VAN DONKELAAR EDWIN TEUNIS
4 granted patents·25 citations·filing 2004–2006
70Inventor score
Files withASML NETHERLANDS BV4
Top patents by PatentIndex Score
4 records- 0181US7271917B2Lithographic apparatus, position quantity detection system and methodASML NETHERLANDS BV·Filed 2005·Granted Sep 18, 2007·9 cites·18 claims
- 0265US7289858B2Lithographic motion control system and methodASML NETHERLANDS BV·Filed 2004·Granted Oct 30, 2007·14 cites·9 claims
- 0345US7148950B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 12, 2006·2 cites·11 claims
- 0442US7774287B2System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Aug 10, 2010·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →