Inventor · disambiguated record
Eelco Van Setten
Also filed as: VAN SETTEN EELCO
4 granted patents·1 citations·filing 2014–2019
55Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV4
Top patents by PatentIndex Score
4 records- 0172US11314174B2Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Apr 26, 2022·1 cites·12 claims
- 0252US11815808B2Method for high numerical aperture thru-slit source mask optimizationASML NETHERLANDS BV·Filed 2019·Granted Nov 14, 2023·0 cites·20 claims
- 0352US10928735B2Patterning deviceASML NETHERLANDS BV·Filed 2019·Granted Feb 23, 2021·0 cites·20 claims
- 0438US9798225B2Method of characterizing, method of forming a model, method of simulating, mask manufacturing method and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Oct 24, 2017·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Eelco Van Setten files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →