Inventor · disambiguated record
Eiichiro Shiba
Also filed as: SHIBA EIICHIRO
12 granted patents·1,348 citations·filing 2014–2023
90Inventor score
Files withASM IP HOLDING BV12
Top patents by PatentIndex Score
12 records- 0197US9711345B2Method for forming aluminum nitride-based film by PEALDASM IP HOLDING BV·Filed 2015·Granted Jul 18, 2017·465 cites·11 claims
- 0297US9447498B2Method for performing uniform processing in gas system-sharing multiple reaction chambersASM IP HOLDING BV·Filed 2014·Granted Sep 20, 2016·498 cites·15 claims
- 0395US10529554B2Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenchesASM IP HOLDING BV·Filed 2017·Granted Jan 7, 2020·377 cites·13 claims
- 0492US11821078B2Method for forming precoat film and method for forming silicon-containing filmASM IP HOLDING BV·Filed 2021·Granted Nov 21, 2023·4 cites·9 claims
- 0585US11961741B2Method for fabricating layer structure having target topological profileASM IP HOLDING BV·Filed 2021·Granted Apr 16, 2024·1 cites·15 claims
- 0682US11827981B2Method of depositing material on stepped structureASM IP HOLDING BV·Filed 2021·Granted Nov 28, 2023·1 cites·15 claims
- 0781US11676812B2Method for forming silicon nitride film selectively on top/bottom portionsASM IP HOLDING BV·Filed 2020·Granted Jun 13, 2023·1 cites·10 claims
- 0875US12266540B2Method for fabricating layer structure having target topological profileASM IP HOLDING BV·Filed 2023·Granted Apr 1, 2025·0 cites·16 claims
- 0972US10720322B2Method for forming silicon nitride film selectively on top surfaceASM IP HOLDING BV·Filed 2018·Granted Jul 21, 2020·1 cites·5 claims
- 1060US12100597B2Method and system for forming patterned structures including silicon nitrideASM IP HOLDING BV·Filed 2022·Granted Sep 24, 2024·0 cites·19 claims
- 1151US12431354B2Silicon nitride and silicon oxide deposition methods using fluorine inhibitorASM IP HOLDING BV·Filed 2021·Granted Sep 30, 2025·0 cites·22 claims
- 1250US12098460B2Systems and methods for stabilizing reaction chamber pressureASM IP HOLDING BV·Filed 2021·Granted Sep 24, 2024·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →