Inventor · disambiguated record
Eiichi Sugawara
Also filed as: ENDOH TAKAO · SUGAWARA EIICHI
12 granted patents·1 pending application·82 citations·filing 1978–2018
90Inventor score
Files withTOKYO ELECTRON LTD5DAINICHISEIKA COLOR CHEM4SUGAWARA EIICHI2MORIYA TSUYOSHI1SEKITA YUKITERU1
Top patents by PatentIndex Score
13 records- 0189US11328910B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted May 10, 2022·5 cites·26 claims
- 0288US9799542B2Substrate processing apparatusSUGAWARA EIICHI·Filed 2012·Granted Oct 24, 2017·13 cites·7 claims
- 0378US7927066B2Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing componentTOKYO ELECTRON LTD·Filed 2006·Granted Apr 19, 2011·8 cites·12 claims
- 0473US5929188APolycarbodiimide compound, production process thereof, resin composition, and treatment method of articleDAINICHISEIKA COLOR CHEM·Filed 1997·Granted Jul 27, 1999·24 cites·6 claims
- 0563US8356970B2Exhaust pump, communicating pipe, and exhaust systemTOKYO ELECTRON LTD·Filed 2008·Granted Jan 22, 2013·3 cites·15 claims
- 0660US8894355B2Turbomolecular pump, and particle trap for turbomolecular pumpSEKITA YUKITERU·Filed 2010·Granted Nov 25, 2014·3 cites·12 claims
- 0760US8727708B2Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing componentMORIYA TSUYOSHI·Filed 2011·Granted May 20, 2014·1 cites·20 claims
- 0860US4240943ATextile finishing compositionDAINICHISEIKA COLOR CHEM·Filed 1978·Granted Dec 23, 1980·14 cites·8 claims
- 0958US8062432B2Cleaning method for turbo molecular pumpSUGAWARA EIICHI·Filed 2008·Granted Nov 22, 2011·0 cites·7 claims
- 1056US10224226B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Mar 5, 2019·0 cites·3 claims
- 1151US6211293B1Polycarbodiimide compound, production process thereof, resin composition, and treatment method of articleDAINICHISEIKA COLOR CHEM·Filed 1999·Granted Apr 3, 2001·10 cites·8 claims
- 1246US2010043894A1Valve element, particle entry preventive mechanism, exhaust control apparatus, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1325US5489643ACoating compositionsDAINICHISEIKA COLOR CHEM·Filed 1994·Granted Feb 6, 1996·1 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →