Inventor · disambiguated record
Ekaterina A. Mikhaylichenko
Also filed as: MIKHAYLICHENKO EKATERINA · MIKHAYLICHENKO EKATERINA A
14 granted patents·30 pending applications·5 citations·filing 2013–2025
84Inventor score
Files withAPPLIED MATERIALS INC44
Top patents by PatentIndex Score
44 records- 0182US2024017376A1Monitoring thickness in face-up polishing with rollerAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0282US2024017371A1Monitoring thickness in face-up polishingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0378US9984867B2Systems and methods for rinsing and drying substratesAPPLIED MATERIALS INC·Filed 2015·Granted May 29, 2018·3 cites·17 claims
- 0476US11289347B2Non-contact clean moduleAPPLIED MATERIALS INC·Filed 2019·Granted Mar 29, 2022·2 cites·16 claims
- 0575US2025375853A1Slurry-based temperature control for cmpAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0674US2022281070A1Slurry-based temperature control for cmpAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0774US2022281061A1Temperature control with intra-layer transition during cmpAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0872US12051599B2Cleaning method with in-line SPM processingAPPLIED MATERIALS INC·Filed 2023·Granted Jul 30, 2024·0 cites·18 claims
- 0970US2024253183A1Apparatus and method for controlling substrate polish edge uniformityAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1069US2025114896A1Individually rotatable platens and control of carrier head sweepAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1169US2025108473A1Polishing head with decoupled membrane position controlAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1269US2025108479A1Polishing head with flexure extending through pressure chamberAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1369US2025114899A1Cmp with individually rotatable platensAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1469US2025108477A1Chemical mechanical polishing edge control with pad recessesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1568US2025114901A1Grooves for edge and hot spot compensation in chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1668US2024042571A1Spray system for slurry reduction during chemical mechanical polishing (cmp)APPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1768US2025114898A1Retaining ring for edge compensation by slurry flow controlAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1868US2025114897A1Edge and hot spot compensation techniques in chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1967US2024139906A1Control of carrier head sweep and platen shapeAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2064US12194591B2Roller for location-specific wafer polishingAPPLIED MATERIALS INC·Filed 2022·Granted Jan 14, 2025·0 cites·15 claims
- 2163US11819976B2Spray system for slurry reduction during chemical mechanical polishing (cmp)APPLIED MATERIALS INC·Filed 2021·Granted Nov 21, 2023·0 cites·19 claims
- 2263US11682567B2Cleaning system with in-line SPM processingAPPLIED MATERIALS INC·Filed 2021·Granted Jun 20, 2023·0 cites·12 claims
- 2362US2024383099A1Multi head pad conditioning apparatus and method of useAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2462US2025353042A1Atomization of cleaning liquid dispense in cleaner modulesAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2561US11764069B2Asymmetry correction via variable relative velocity of a waferAPPLIED MATERIALS INC·Filed 2021·Granted Sep 19, 2023·0 cites·18 claims
- 2661US11721563B2Non-contact clean moduleAPPLIED MATERIALS INC·Filed 2021·Granted Aug 8, 2023·0 cites·12 claims
- 2761US2023356354A1Compliant inner ring for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2860US12027382B2Surface cleaning with directed high pressure chemistryAPPLIED MATERIALS INC·Filed 2021·Granted Jul 2, 2024·0 cites·20 claims
- 2960US2025360596A1Chemical mechanical polishing method using foamed slurry and apparatus for foamed slurry generationAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3060US2024033878A1Minimizing substrate bow during polishingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3159US2022134505A1Horizontal buffing moduleAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 3252US2023356355A1Polishing head with local inner ring downforce controlAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3352US2025332615A1Processing module having a priming systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3451US12198944B2Substrate handling in a modular polishing system with single substrate cleaning chambersAPPLIED MATERIALS INC·Filed 2021·Granted Jan 14, 2025·0 cites·15 claims
- 3551US11942319B2Pad carrier for horizontal pre-clean moduleAPPLIED MATERIALS INC·Filed 2021·Granted Mar 26, 2024·0 cites·15 claims
- 3651US2024395579A1Droplet jet nozzle designAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3748US2024390924A1Droplet jet nozzle designAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3843US10751738B2Spray bar design for uniform liquid flow distribution on a substrateAPPLIED MATERIALS INC·Filed 2017·Granted Aug 25, 2020·0 cites·20 claims
- 3943US2016083676A1Method and apparatus for high efficiency post cmp clean using engineered viscous fluidAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 4042US2015090299A1Processes and apparatus for cleaning, rinsing, and drying substratesAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 4141US10786885B2Thin plastic polishing article for CMP applicationsAPPLIED MATERIALS INC·Filed 2018·Granted Sep 29, 2020·0 cites·20 claims
- 4236US9859135B2Substrate rinsing systems and methodsAPPLIED MATERIALS INC·Filed 2015·Granted Jan 2, 2018·0 cites·15 claims
- 4330US2016201986A1Substrate holder assembly, apparatus, and methodsAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 4429US2016178279A1Substrate edge residue removal systems, apparatus, and methodsAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →