Inventor · disambiguated record
Elina Färm
Also filed as: FÄRM ELINA
17 granted patents·12 pending applications·441 citations·filing 2011–2025
92Inventor score
Top patents by PatentIndex Score
29 records- 0198US10428421B2Selective deposition on metal or metallic surfaces relative to dielectric surfacesASM IP HOLDING BV·Filed 2016·Granted Oct 1, 2019·63 cites·12 claims
- 0297US11094535B2Selective passivation and selective depositionASM IP HOLDING BV·Filed 2018·Granted Aug 17, 2021·20 cites·19 claims
- 0396US11885014B2Transition metal nitride deposition methodASM IP HOLDING BV·Filed 2022·Granted Jan 30, 2024·3 cites·11 claims
- 0494US11081342B2Selective deposition using hydrophobic precursorsASM IP HOLDING BV·Filed 2017·Granted Aug 3, 2021·8 cites·23 claims
- 0594US9223203B2Microcontact printed films as an activation layer for selective atomic layer depositionFÄRM ELINA·Filed 2011·Granted Dec 29, 2015·339 cites·17 claims
- 0689US12365984B2Transition metal deposition processes and deposition assemblyASM IP HOLDING BV·Filed 2023·Granted Jul 22, 2025·1 cites·19 claims
- 0788US12406881B2Methods and systems for filling a gapASM IP HOLDING BV·Filed 2022·Granted Sep 2, 2025·1 cites·17 claims
- 0887US10937645B2Methods for preparing self-assembled monolayersASM IP HOLDING BV·Filed 2018·Granted Mar 2, 2021·3 cites·31 claims
- 0985US11495455B2Apparatus for forming self-assembled monolayersASM IP HOLDING BV·Filed 2021·Granted Nov 8, 2022·1 cites·20 claims
- 1081US11430656B2Deposition of oxide thin filmsASM IP HOLDING BV·Filed 2016·Granted Aug 30, 2022·2 cites·21 claims
- 1181US2025037995A1Deposition of oxide thin filmsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1280US11174550B2Selective deposition on metal or metallic surfaces relative to dielectric surfacesASM IP HOLDING BV·Filed 2019·Granted Nov 16, 2021·0 cites·20 claims
- 1380US2025069885A1Selective passivation and selective depositionASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1480US2025357199A1Methods and systems for filling a gapASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1577US12404583B2Transition metal nitride deposition methodASM IP HOLDING BV·Filed 2023·Granted Sep 2, 2025·0 cites·15 claims
- 1677US12154785B2Deposition of oxide thin filmsASM IP HOLDING BV·Filed 2022·Granted Nov 26, 2024·0 cites·14 claims
- 1777US11749523B2Methods for preparing self-assembled monolayersASM IP HOLDING BV·Filed 2022·Granted Sep 5, 2023·0 cites·20 claims
- 1877US2022025513A1Selective deposition on metal or metallic surfaces relative to dielectric surfacesASM IP HOLDING BV·Filed 2021·Application pending·0 cites
- 1971US12170197B2Selective passivation and selective depositionASM IP HOLDING BV·Filed 2021·Granted Dec 17, 2024·0 cites·15 claims
- 2070US12080548B2Selective deposition using hydrophobic precursorsASM IP HOLDING BV·Filed 2021·Granted Sep 3, 2024·0 cites·34 claims
- 2169US2024133032A1Transition metal deposition methodASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 2268US11885020B2Transition metal deposition methodASM IP HOLDING BV·Filed 2021·Granted Jan 30, 2024·0 cites·18 claims
- 2359US2024096632A1Transition metal deposition processes and a deposition assemblyASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 2456US2024096633A1Methods and assemblies for selectively depositing transition metalsASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 2555US2024218505A1Method of forming molybdenum silicideASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 2654US2023096838A1Methods and systems for filling a gapASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 2750US2022139713A1Molybdenum deposition methodASM IP HOLDING BV·Filed 2021·Application pending·0 cites
- 2846US2022254642A1Selective deposition of transition metal-containing materialASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 2940US2019368040A1Infiltration apparatus and methods of infiltrating an infiltrateable materialASM IP HOLDING BV·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →