Inventor · disambiguated record
Eric A. Armour
Also filed as: ARMOUR ERIC · ARMOUR ERIC A
25 granted patents·26 pending applications·1,057 citations·filing 1991–2025
96Inventor score
Files withVEECO INSTR INC26MITROVIC BOJAN5VEECO COMPOUND SEMICONDUCTOR INC3BOGUSLAVSKIY VADIM2LEE DONG SEUNG2
Top patents by PatentIndex Score
51 records- 0199US10134617B2Wafer carrier having thermal cover for chemical vapor deposition systemsVEECO INSTR INC·Filed 2014·Granted Nov 20, 2018·369 cites·14 claims
- 0298US6001183AWafer carriers for epitaxial growth processesEMCORE CORP·Filed 1996·Granted Dec 14, 1999·550 cites·25 claims
- 0395US8287646B2Gas treatment systemsMITROVIC BOJAN·Filed 2010·Granted Oct 16, 2012·16 cites·12 claims
- 0495US8092599B2Movable injectors in rotating disc gas reactorsSFERLAZZO PIERO·Filed 2007·Granted Jan 10, 2012·29 cites·39 claims
- 0594US8152923B2Gas treatment systemsMITROVIC BOJAN·Filed 2008·Granted Apr 10, 2012·21 cites·11 claims
- 0684US9273395B2Gas treatment systemsMITROVIC BOJAN·Filed 2010·Granted Mar 1, 2016·2 cites·19 claims
- 0784US8022372B2Apparatus and method for batch non-contact material characterizationVEECO INSTR INC·Filed 2009·Granted Sep 20, 2011·8 cites·34 claims
- 0883US9653340B2Heated wafer carrier profilingBOGUSLAVSKIY VADIM·Filed 2012·Granted May 16, 2017·6 cites·16 claims
- 0980US8603248B2System and method for varying wafer surface temperature via wafer-carrier temperature offsetGURARY ALEX·Filed 2006·Granted Dec 10, 2013·9 cites·44 claims
- 1078US8980000B2Density-matching alkyl push flow for vertical flow rotating disk reactorsMITROVIC BOJAN·Filed 2006·Granted Mar 17, 2015·2 cites·22 claims
- 1178US8815709B2Chemical vapor deposition with energy inputMANGUM JOSHUA·Filed 2009·Granted Aug 26, 2014·2 cites·23 claims
- 1277US8198605B2Apparatus and method for batch non-contact material characterizationLEE DONG SEUNG·Filed 2011·Granted Jun 12, 2012·4 cites·20 claims
- 1375US9748113B2Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition systemVEECO INSTR INC·Filed 2015·Granted Aug 29, 2017·2 cites·30 claims
- 1472US10364509B2Alkyl push flow for vertical flow rotating disk reactorsVEECO INSTR INC·Filed 2018·Granted Jul 30, 2019·0 cites·18 claims
- 1572US2014318453A1Chemical vapor deposition with energy inputVEECO INSTR INC·Filed 2014·Application pending·0 cites
- 1669US9938621B2Methods of wafer processing with carrier extensionVEECO INSTR INC·Filed 2016·Granted Apr 10, 2018·1 cites·12 claims
- 1769US8958061B2Heated wafer carrier profilingBOGUSLAVSKIY VADIM·Filed 2012·Granted Feb 17, 2015·2 cites·33 claims
- 1869US2010086703A1Vapor Phase Epitaxy SystemVEECO COMPOUND SEMICONDUCTOR I·Filed 2009·Application pending·0 cites
- 1968US9593434B2Alkyl push flow for vertical flow rotating disk reactorsVEECO INSTR INC·Filed 2014·Granted Mar 14, 2017·0 cites·7 claims
- 2067US9982362B2Density-matching alkyl push flow for vertical flow rotating disk reactorsVEECO INSTR INC·Filed 2015·Granted May 29, 2018·0 cites·20 claims
- 2167US2014360430A1Wafer carrier having thermal uniformity-enhancing featuresVEECO INSTR INC·Filed 2014·Application pending·0 cites
- 2266US10570510B2Periphery purge shutter and flow control systems and methodsVEECO INSTR INC·Filed 2017·Granted Feb 25, 2020·1 cites·9 claims
- 2366US5438585AUnstable resonator semiconductor laserUNIV NEW MEXICO·Filed 1994·Granted Aug 1, 1995·21 cites·8 claims
- 2466US2011174213A1Vapor Phase Epitaxy SystemVEECO COMPOUND SEMICONDUCTOR INC·Filed 2009·Application pending·0 cites
- 2562US10099185B2Enhanced enclosures for acoustical gas concentration sensing and flow controlVEECO INSTR INC·Filed 2015·Granted Oct 16, 2018·1 cites·20 claims
- 2662US2025263837A1Flared shutter liner for chemical vapor deposition systemVEECO INSTR INC·Filed 2025·Application pending·0 cites
- 2761US2012070916A1Movable injectors in rotating disc gas reactorsSFERLAZZO PIERO·Filed 2011·Application pending·0 cites
- 2861US2016168710A1Gas Injection System For Chemical Vapor Deposition Using Sequenced ValvesVEECO INSTR INC·Filed 2016·Application pending·0 cites
- 2959US2010310766A1Roll-to-Roll Chemical Vapor Deposition SystemVEECO COMPOUND SEMICONDUCTOR INC·Filed 2009·Application pending·0 cites
- 3059US2010310769A1Continuous Feed Chemical Vapor Deposition SystemVEECO COMPOUND SEMICONDUCTOR INC·Filed 2009·Application pending·0 cites
- 3156US2024102166A1Wafer carrier assembly with improved temperature uniformityVEECO INSTR INC·Filed 2023·Application pending·0 cites
- 3255US2019157125A1Wafer carrier having thermal cover for chemical vapor deposition systemsVEECO INSTR INC·Filed 2018·Application pending·0 cites
- 3354US9303319B2Gas injection system for chemical vapor deposition using sequenced valvesQUINN WILLIAM E·Filed 2010·Granted Apr 5, 2016·0 cites·17 claims
- 3454US2018230596A1Wafer processing with carrier extensionVEECO INSTR INC·Filed 2018·Application pending·0 cites
- 3553US2010300359A1Multi-gas distribution injector for chemical vapor deposition reactorsVEECO INSTR INC·Filed 2010·Application pending·0 cites
- 3652US2006021574A1Multi-gas distribution injector for chemical vapor deposition reactorsVEECO INSTR INC·Filed 2005·Application pending·0 cites
- 3750US10167554B2Wafer processing with carrier extensionMITROVIC BOJAN·Filed 2011·Granted Jan 1, 2019·0 cites·20 claims
- 3850US8441653B2Apparatus and method for batch non-contact material characterizationLEE DONG SEUNG·Filed 2012·Granted May 14, 2013·0 cites·26 claims
- 3948US2023060609A1Wafer carrier assembly with pedestal and cover restraint arrangements that control thermal gapsVEECO INSTR INC·Filed 2021·Application pending·0 cites
- 4048US2010055318A1Wafer carrier with varying thermal resistanceVEECO INSTR INC·Filed 2009·Application pending·0 cites
- 4148US2011114022A1Wafer carrier with hubVEECO INSTR INC·Filed 2008·Application pending·0 cites
- 4245US2007071896A1Alkyl push flow for vertical flow rotating disk reactorsVEECO INSTR INC·Filed 2003·Application pending·0 cites
- 4345US2016160387A1Linear Cluster Deposition SystemVEECO INSTR INC·Filed 2016·Application pending·0 cites
- 4444US2017121847A1Wafer carrier having thermal uniformity-enhancing featuresVEECO INSTR INC·Filed 2017·Application pending·0 cites
- 4540US2020063287A1Chemical vapor deposition wafer carriersVEECO INSTR INC·Filed 2018·Application pending·0 cites
- 4640US2020056284A1Chemical vapor deposition wafer carriersVEECO INSTR INC·Filed 2018·Application pending·0 cites
- 4739US5275686ARadial epitaxial reactor for multiple wafer growthUNIV NEW MEXICO·Filed 1991·Granted Jan 4, 1994·11 cites·6 claims
- 4839US2011290175A1Multi-Chamber CVD Processing SystemPARANJPE AJIT·Filed 2011·Application pending·0 cites
- 4938US2012058630A1Linear Cluster Deposition SystemQUINN WILLIAM E·Filed 2010·Application pending·0 cites
- 5037US2013065403A1Wafer carrier with thermal featuresPARANJPE AJIT·Filed 2012·Application pending·0 cites
Showing the top 50 of 51 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →