Inventor · disambiguated record
Erina Baba
Also filed as: BABA ERINA
1 granted patent·7 pending applications·0 citations·filing 2018–2024
7Inventor score
Files withEBARA CORP8
Top patents by PatentIndex Score
8 records- 0166US2024082885A1Substrate cleaning device and method of cleaning substrateEBARA CORP·Filed 2023·Application pending·0 cites
- 0258US2022203411A1Substrate cleaning device and method of cleaning substrateEBARA CORP·Filed 2021·Application pending·0 cites
- 0356US2025205850A1Non-contact pad cleaning apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 0451US2023182262A1Substrate cleaning device and substrate polishing deviceEBARA CORP·Filed 2022·Application pending·0 cites
- 0547US12033847B2Cleaning module, substrate processing apparatus including cleaning module, and cleaning methodEBARA CORP·Filed 2019·Granted Jul 9, 2024·0 cites·12 claims
- 0642US2024408649A1Substrate cleaning device and substrate polishing deviceEBARA CORP·Filed 2024·Application pending·0 cites
- 0735US2022168866A1Substrate processing apparatus and substrate processing method using photocatalystEBARA CORP·Filed 2020·Application pending·0 cites
- 0832US2019143477A1Apparatus and method for planarizing substrateEBARA CORP·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →