Inventor · disambiguated record
Erik H. Engdahl
Also filed as: ENGDAHL ERIK · ENGDAHL ERIK H
13 granted patents·602 citations·filing 1995–2002
94Inventor score
Top patents by PatentIndex Score
13 records- 0195US6428394B1Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feedLAM RES CORP·Filed 2000·Granted Aug 6, 2002·65 cites·19 claims
- 0295US5762536ASensors for a linear polisherLAM RES CORP·Filed 1997·Granted Jun 9, 1998·150 cites·20 claims
- 0391US6146248AMethod and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisherLAM RES CORP·Filed 1997·Granted Nov 14, 2000·114 cites·37 claims
- 0488US6261155B1Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisherLAM RES CORP·Filed 2000·Granted Jul 17, 2001·42 cites·20 claims
- 0586US6645046B1Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafersLAM RES CORP·Filed 2000·Granted Nov 11, 2003·40 cites·13 claims
- 0682US6500056B1Linear reciprocating disposable belt polishing method and apparatusLAM RES CORP·Filed 2000·Granted Dec 31, 2002·22 cites·8 claims
- 0779US6517418B2Method of transporting a semiconductor wafer in a wafer polishing systemLAM RES CORP·Filed 2001·Granted Feb 11, 2003·18 cites·15 claims
- 0879US6336845B1Method and apparatus for polishing semiconductor wafersLAM RES CORP·Filed 1997·Granted Jan 8, 2002·45 cites·25 claims
- 0978US6224461B1Method and apparatus for stabilizing the process temperature during chemical mechanical polishingLAM RES CORP·Filed 1999·Granted May 1, 2001·44 cites·22 claims
- 1076US6746320B2Linear reciprocating disposable belt polishing method and apparatusLAM RES CORP·Filed 2002·Granted Jun 8, 2004·15 cites·6 claims
- 1164US6729945B2Apparatus for controlling leading edge and trailing edge polishingLAM RES CORP·Filed 2001·Granted May 4, 2004·11 cites·23 claims
- 1262US5618351AThermal processing apparatus and processSILICON VALLEY GROUP·Filed 1995·Granted Apr 8, 1997·31 cites·20 claims
- 1350US6716093B2Low friction gimbaled substrate holder for CMP apparatusLAM RES CORP·Filed 2001·Granted Apr 6, 2004·5 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →