Inventor · disambiguated record
Erik Henricus Egidius Catharina Eummelen
Also filed as: EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA
39 granted patents·2 pending applications·41 citations·filing 2009–2025
96Inventor score
Files withASML NETHERLANDS BV30BESSEMS DAVID2CLOIN CHRISTIAN GERARDUS NORBERTUS HENDRICUS MARIE1DIRECKS DANIEL JOZEF MARIA1EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA1
Top patents by PatentIndex Score
41 records- 0192US11231653B2Fluid handling structure and lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Jan 25, 2022·2 cites·20 claims
- 0287US10416571B2Fluid handling structure and lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Sep 17, 2019·4 cites·20 claims
- 0387US8836912B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodBESSEMS DAVID·Filed 2011·Granted Sep 16, 2014·6 cites·20 claims
- 0484US10551748B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Feb 4, 2020·3 cites·20 claims
- 0583US10969695B2Fluid handling structure and lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Apr 6, 2021·2 cites·20 claims
- 0683US2025370347A1Fluid handling system, method and lithographic apparatusASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 0782US12072636B2Fluid handling system and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Aug 27, 2024·1 cites·20 claims
- 0878US12242200B2Lithography apparatus and a method of manufacturing a deviceASML NETHERLANDS BV·Filed 2023·Granted Mar 4, 2025·0 cites·20 claims
- 0978US8599356B2Shutter member, a lithographic apparatus and device manufacturing methodKANEKO TAKESHI·Filed 2010·Granted Dec 3, 2013·4 cites·20 claims
- 1078US8405817B2Lithographic apparatus, a method of controlling the apparatus and a device manufacturing methodSTAVENGA MARCO KOERT·Filed 2010·Granted Mar 26, 2013·4 cites·20 claims
- 1176US9176393B2Lithographic apparatus and a method of operating the apparatusCLOIN CHRISTIAN GERARDUS NORBERTUS HENDRICUS MARIE·Filed 2009·Granted Nov 3, 2015·5 cites·20 claims
- 1275US11614689B2Fluid handling structure and lithographic apparatusASML NETHERLANDS BV·Filed 2022·Granted Mar 28, 2023·0 cites·20 claims
- 1375US10216100B2Inspection substrate and an inspection methodASML NETHERLANDS BV·Filed 2016·Granted Feb 26, 2019·2 cites·7 claims
- 1474US12072635B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2021·Granted Aug 27, 2024·0 cites·19 claims
- 1574US11199771B2Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Dec 14, 2021·2 cites·20 claims
- 1672US12429778B2Fluid handling system, method and lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Sep 30, 2025·0 cites·20 claims
- 1771US11774857B2Lithography apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2022·Granted Oct 3, 2023·0 cites·20 claims
- 1871US11187991B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2015·Granted Nov 30, 2021·1 cites·20 claims
- 1971US8416388B2Fluid handling device, an immersion lithographic apparatus and a device manufacturing methodEUMMELEN ERIK HENRICUS EGIDIUS CATHARINA·Filed 2010·Granted Apr 9, 2013·2 cites·20 claims
- 2068US8446561B2Lithographic apparatus and a method of measuring flow rate in a two phase flowKRAMER PIETER JACOB·Filed 2010·Granted May 21, 2013·2 cites·13 claims
- 2167US10859919B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Dec 8, 2020·0 cites·20 claims
- 2266US2021088912A1Fluid handling structure, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
- 2362US12287570B2Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Apr 29, 2025·0 cites·20 claims
- 2461US12287580B2Fluid handling system, method and lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Apr 29, 2025·0 cites·21 claims
- 2559US9291914B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 22, 2016·0 cites·20 claims
- 2659US9036127B2Lithographic apparatusVAN DEN DUNGEN CLEMENS JOHANNES GERARDUS·Filed 2009·Granted May 19, 2015·1 cites·20 claims
- 2758US10649341B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted May 12, 2020·0 cites·22 claims
- 2856US10725390B2Inspection substrate and an inspection methodASML NETHERLANDS BV·Filed 2019·Granted Jul 28, 2020·0 cites·17 claims
- 2956US10534270B2Lithography apparatus, a method of manufacturing a device and a control programASML NETHERLANDS BV·Filed 2019·Granted Jan 14, 2020·0 cites·20 claims
- 3055US11720032B2Process tool and an inspection methodASML NETHERLANDS BV·Filed 2019·Granted Aug 8, 2023·0 cites·20 claims
- 3155US11372336B2Lithography apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jun 28, 2022·0 cites·21 claims
- 3255US9465302B2Lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 11, 2016·0 cites·20 claims
- 3353US12443115B2Measurement system and method for characterizing a patterning deviceASML NETHERLANDS BV·Filed 2020·Granted Oct 14, 2025·0 cites·15 claims
- 3451US9195147B2Lithographic apparatus and device manufacturing method involving a seal between a table and a componentSTEFFENS KOEN·Filed 2009·Granted Nov 24, 2015·0 cites·20 claims
- 3546US10261422B2Lithography apparatus and method of manufacturing a deviceASML NETHERLANDS BV·Filed 2015·Granted Apr 16, 2019·0 cites·20 claims
- 3644US9625828B2Fluid handling structure, lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2011·Granted Apr 18, 2017·0 cites·20 claims
- 3743US11048178B2Lithographic apparatus with improved patterning performanceASML NETHERLANDS BV·Filed 2018·Granted Jun 29, 2021·0 cites·20 claims
- 3841US11143969B2Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Oct 12, 2021·0 cites·20 claims
- 3941US9563132B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodBESSEMS DAVID·Filed 2012·Granted Feb 7, 2017·0 cites·20 claims
- 4039US9618835B2Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressureDIRECKS DANIEL JOZEF MARIA·Filed 2011·Granted Apr 11, 2017·0 cites·20 claims
- 4137US10095129B2Lithographic apparatus and a method of manufacturing a device using a lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 9, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →