Inventor · disambiguated record
Eric R. Harrington
Also filed as: HARRINGTON ERIC R
4 granted patents·78 citations·filing 2000–2006
78Inventor score
Top patents by PatentIndex Score
4 records- 0185US6476399B1System and method for removing contaminant particles relative to an ion beamAXCELIS TECH INC·Filed 2000·Granted Nov 5, 2002·23 cites·23 claims
- 0283US7608843B2Method and apparatus for scanning a workpiece through an ion beamTEL EPION INC·Filed 2006·Granted Oct 27, 2009·10 cites·25 claims
- 0383US6534775B1Electrostatic trap for particles entrained in an ion beamAXCELIS TECH INC·Filed 2000·Granted Mar 18, 2003·30 cites·18 claims
- 0470US6525326B1System and method for removing particles entrained in an ion beamAXCELIS TECH INC·Filed 2000·Granted Feb 25, 2003·15 cites·27 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →