Inventor · disambiguated record
Eric D. Hermanson
Also filed as: HERMANSON ERIC · HERMANSON ERIC D
38 granted patents·3 pending applications·106 citations·filing 2002–2022
96Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT15VARIAN SEMICONDUCTOR EQUIPMENT ASS INC14APPLIED MATERIALS INC7CITVER GREGORY1LOW RUSSELL1
Top patents by PatentIndex Score
41 records- 0193US9978554B1Dual cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted May 22, 2018·9 cites·19 claims
- 0289US7394073B2Methods and apparatus for ion beam angle measurement in two dimensionsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Jul 1, 2008·25 cites·16 claims
- 0384US10504682B2Conductive beam optic containing internal heating elementVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Dec 10, 2019·3 cites·18 claims
- 0483US10446372B2Dual cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Oct 15, 2019·2 cites·13 claims
- 0583US7402816B2Electron injection in ion implanter magnetsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Jul 22, 2008·7 cites·24 claims
- 0683US7250617B2Ion beam neutral detectionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Jul 31, 2007·7 cites·24 claims
- 0783US6791097B2Adjustable conductance limiting aperture for ion implantersVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2002·Granted Sep 14, 2004·19 cites·25 claims
- 0878US7202483B2Methods and apparatus for ion beam angle measurement in two dimensionsOLSON JOSEPH C·Filed 2005·Granted Apr 10, 2007·6 cites·27 claims
- 0977US10410844B2RF clean system for electrostatic elementsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Sep 10, 2019·2 cites·10 claims
- 1076US7842934B2Terminal structures of an ion implanter having insulated conductors with dielectric finsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Nov 30, 2010·4 cites·22 claims
- 1175US9613778B1Connector for process chamber electrostatic elementsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Apr 4, 2017·2 cites·20 claims
- 1275US8481960B2Deceleration lensRADOVANOV SVETLANA·Filed 2011·Granted Jul 9, 2013·4 cites·20 claims
- 1374US7170067B2Ion beam measurement apparatus and methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Jan 30, 2007·3 cites·18 claims
- 1472US7482598B2Techniques for preventing parasitic beamlets from affecting ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Jan 27, 2009·3 cites·28 claims
- 1571US11114277B2Dual cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Sep 7, 2021·0 cites·18 claims
- 1671US7863520B2Interfacing two insulation parts in high voltage environmentVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Jan 4, 2011·2 cites·5 claims
- 1769US11049691B2Ion beam quality control using a movable mass resolving deviceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jun 29, 2021·1 cites·11 claims
- 1869US7576337B2Power supply for an ion implantation systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Aug 18, 2009·3 cites·16 claims
- 1966US10741361B2Dual cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Granted Aug 11, 2020·0 cites·18 claims
- 2064US10157763B2High throughput substrate handling endstation and sequenceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Dec 18, 2018·1 cites·10 claims
- 2162US8698108B1Ion beam measurement system and methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Apr 15, 2014·1 cites·18 claims
- 2260US12165852B2Cover ring to mitigate carbon contamination in plasma doping chamberAPPLIED MATERIALS INC·Filed 2022·Granted Dec 10, 2024·0 cites·15 claims
- 2360US11562885B2Particle yield via beam-line pressure controlAPPLIED MATERIALS INC·Filed 2021·Granted Jan 24, 2023·0 cites·20 claims
- 2457US11810754B2System using pixelated faraday sensorAPPLIED MATERIALS INC·Filed 2021·Granted Nov 7, 2023·0 cites·18 claims
- 2557US8143604B2Insulator system for a terminal structure of an ion implantation systemLOW RUSSELL·Filed 2006·Granted Mar 27, 2012·2 cites·14 claims
- 2655US10886098B2Electrostatic filter and ion implanter having asymmetric electrostatic configurationAPPLIED MATERIALS INC·Filed 2018·Granted Jan 5, 2021·0 cites·19 claims
- 2754US7799999B2Insulated conducting device with multiple insulation segmentsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Sep 21, 2010·0 cites·22 claims
- 2854US2024087839A1Managing beam power effects by varying base emissivityAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2953US9484183B2Linkage conduit for vacuum chamber applicationsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Nov 1, 2016·0 cites·18 claims
- 3052US11437215B2Electrostatic filter providing reduced particle generationAPPLIED MATERIALS INC·Filed 2019·Granted Sep 6, 2022·0 cites·19 claims
- 3152US11222768B2Foam in ion implantation systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Granted Jan 11, 2022·0 cites·20 claims
- 3252US11011343B2High-current ion implanter and method for controlling ion beam using high-current ion implanterAPPLIED MATERIALS INC·Filed 2019·Granted May 18, 2021·0 cites·20 claims
- 3352US10867772B2Electrostatic element having grooved exterior surfaceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Dec 15, 2020·0 cites·13 claims
- 3452US7476878B2Techniques for reducing effects of photoresist outgassingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Jan 13, 2009·0 cites·23 claims
- 3551US8455760B2Interfacing two insulation parts in high voltage environmentLOW RUSSELL J·Filed 2011·Granted Jun 4, 2013·0 cites·10 claims
- 3649US2009057573A1Techniques for terminal insulation in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Application pending·0 cites
- 3748US10643823B2Foam in ion implantation systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted May 5, 2020·0 cites·20 claims
- 3847US2011094862A1Techniques for making high voltage connectionsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2011·Application pending·0 cites
- 3946US7863531B2Techniques for making high voltage connectionsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Jan 4, 2011·0 cites·8 claims
- 4044US10119529B2Cryopump arrangement for improved pump speedVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Nov 6, 2018·0 cites·13 claims
- 4143US9008740B2Techniques for protecting a superconducting (SC) tapeCITVER GREGORY·Filed 2011·Granted Apr 14, 2015·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →