Inventor · disambiguated record

Erdinc Karakas

Also filed as: KARAKAS ERDINC

3 granted patents·4 citations·filing 2018–2018

53Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD3

Top patents by PatentIndex Score

3 records

0182US10529589B2Method of plasma etching of silicon-containing organic film using sulfur-based chemistryTOKYO ELECTRON LTD·Filed 2018·Granted Jan 7, 2020·4 cites·21 claims
0246US10699911B2Method of conformal etching selective to other materialsTOKYO ELECTRON LTD·Filed 2018·Granted Jun 30, 2020·0 cites·12 claims
0343US10811273B2Methods of surface restoration for nitride etchingTOKYO ELECTRON LTD·Filed 2018·Granted Oct 20, 2020·0 cites·22 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →