Inventor · disambiguated record
Erik Johan Koop
Also filed as: KOOP ERIK JOHAN
7 granted patents·1 pending application·19 citations·filing 2009–2023
78Inventor score
Top patents by PatentIndex Score
8 records- 0192US10274849B2Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Apr 30, 2019·5 cites·20 claims
- 0291US10558130B2Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Feb 11, 2020·4 cites·22 claims
- 0382US9488465B2Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatusASML NETHERLANDS BV·Filed 2012·Granted Nov 8, 2016·8 cites·49 claims
- 0467US11137695B2Method of determining a height profile, a measurement system and a computer readable mediumASML NETHERLANDS BV·Filed 2017·Granted Oct 5, 2021·1 cites·14 claims
- 0561US2025362617A1Metrology method and associated metrology deviceASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0656US11099489B2Method of measuring a parameter of a lithographic process, metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Aug 24, 2021·0 cites·20 claims
- 0748US8208118B2Method for determining exposure settings, lithographic exposure apparatus, computer program and data carrierBURRY DAVID WARREN·Filed 2009·Granted Jun 26, 2012·1 cites·12 claims
- 0846US10474043B2Method of measuring a property of a substrate, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Nov 12, 2019·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →