Inventor · disambiguated record
Eric Jen Cheng Liu
Also filed as: LIU ERIC JEN CHENG
6 granted patents·6 pending applications·1,006 citations·filing 2013–2025
84Inventor score
Files withASM IP HOLDING BV12
Top patents by PatentIndex Score
12 records- 0196US9790595B2Method and system to reduce outgassing in a reaction chamberASM IP HOLDING BV·Filed 2015·Granted Oct 17, 2017·471 cites·22 claims
- 0296US8993054B2Method and system to reduce outgassing in a reaction chamberASM IP HOLDING BV·Filed 2013·Granted Mar 31, 2015·531 cites·11 claims
- 0384US12295163B2Formation of gate stacks comprising a threshold voltage tuning layerASM IP HOLDING BV·Filed 2022·Granted May 6, 2025·1 cites·15 claims
- 0480US10927459B2Systems and methods for atomic layer depositionASM IP HOLDING BV·Filed 2017·Granted Feb 23, 2021·3 cites·26 claims
- 0571US2025313953A1Methods and systems for forming doped silicon nitride filmsASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 0666US2024229233A1Layer deposition with post-deposition agglomeration mitigationASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0764US12378667B2Methods and systems for forming doped silicon nitride filmsASM IP HOLDING BV·Filed 2022·Granted Aug 5, 2025·0 cites·21 claims
- 0863US11814727B2Systems and methods for atomic layer depositionASM IP HOLDING BV·Filed 2021·Granted Nov 14, 2023·0 cites·13 claims
- 0960US2025105012A1Metal and carbon containing layers, including methods and systems for their manufactureASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1058US2024234129A1Methods and systems for forming structures comprising a threshold voltage tuning layerASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1150US2025277308A1Apparatus and method for providing a pulse of a precursorASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1250US2022403516A1Reactor system and method for forming a layer comprising indium gallium zinc oxideASM IP HOLDING BV·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →