Inventor · disambiguated record
Eric Russell Madsen
Also filed as: MADSEN ERIC · MADSEN ERIC RUSSELL
8 granted patents·6 pending applications·14 citations·filing 2014–2024
79Inventor score
Files withLAM RES CORP14
Top patents by PatentIndex Score
14 records- 0186US10266947B2Rotary friction welded blank for PECVD heated showerheadLAM RES CORP·Filed 2016·Granted Apr 23, 2019·5 cites·11 claims
- 0280US11535936B2Dual gas feed showerhead for depositionLAM RES CORP·Filed 2018·Granted Dec 27, 2022·1 cites·17 claims
- 0379US10483092B2Baffle plate and showerhead assemblies and corresponding manufacturing methodLAM RES CORP·Filed 2016·Granted Nov 19, 2019·3 cites·25 claims
- 0478US9290843B2Ball screw showerhead module adjuster assembly for showerhead module of semiconductor substrate processing apparatusLAM RES CORP·Filed 2014·Granted Mar 22, 2016·5 cites·20 claims
- 0573US2023090368A1Dual Gas Feed Showerhead for DepositionLAM RES CORP·Filed 2022·Application pending·0 cites
- 0668US10941489B2Rotary friction welded blank for PECVD heated showerheadLAM RES CORP·Filed 2019·Granted Mar 9, 2021·0 cites·19 claims
- 0753US2023071933A1Planar multi-layer radio frequency filters including stacked coils with structural capacitanceLAM RES CORP·Filed 2021·Application pending·0 cites
- 0850US2022415624A1Carrier ring to pedestal kinematic mount for substrate processing toolsLAM RES CORP·Filed 2020·Application pending·0 cites
- 0948US12473638B2Liquid precursor vaporizerLAM RES CORP·Filed 2020·Granted Nov 18, 2025·0 cites·15 claims
- 1046US2022415625A1Substrate supports with integrated rf filtersLAM RES CORP·Filed 2020·Application pending·0 cites
- 1143US12480210B2Reduced diameter carrier ring hardware for substrate processing systemsLAM RES CORP·Filed 2020·Granted Nov 25, 2025·0 cites·15 claims
- 1241USD1105018SShower headLAM RES CORP·Filed 2024·Granted Dec 9, 2025·0 cites·1 claims
- 1336US2019376184A1Chemical vapor deposition shower head for uniform gas distributionLAM RES CORP·Filed 2018·Application pending·0 cites
- 1430US2016358808A1Hybrid 200 mm/300 mm semiconductor processing apparatusesLAM RES CORP·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →