Inventor · disambiguated record
Eric Samulon
Also filed as: SAMULON ERIC
2 granted patents·7 pending applications·0 citations·filing 2018–2025
25Inventor score
Technology areasH10P
Files withLAM RES CORP9
Top patents by PatentIndex Score
9 records- 0177US2025364298A1Coolant channel with internal fins for substrate processing pedestalsLAM RES CORP·Filed 2025·Application pending·0 cites
- 0271US2024404798A1High power electrostatic chuck with features preventing he hole light-up/arcingLAM RES CORP·Filed 2024·Application pending·0 cites
- 0359US12381105B2Coolant channel with internal fins for substrate processing pedestalsLAM RES CORP·Filed 2021·Granted Aug 5, 2025·0 cites·29 claims
- 0452US2022223387A1High power electrostatic chuck with features preventing he hole light-up/arcingLAM RES CORP·Filed 2019·Application pending·0 cites
- 0542US2023253193A1Substrate support with uniform temperature across a substrateLAM RES CORP·Filed 2021·Application pending·0 cites
- 0642US2023343627A1Anodization for metal matrix composite semiconductor processing chamber componentsLAM RES CORP·Filed 2021·Application pending·0 cites
- 0740US10741429B2Model-based control of substrate processing systemsLAM RES CORP·Filed 2018·Granted Aug 11, 2020·0 cites·21 claims
- 0840US2023081544A1Component with protective surface for processing chamberLAM RES CORP·Filed 2021·Application pending·0 cites
- 0938US2023039670A1Mixed metal baseplates for improved thermal expansion matching with thermal oxide spraycoatLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →