Inventor · disambiguated record
Eric Wagganer
Also filed as: WAGGANER ERIC · WAGGANER ERIC D
4 granted patents·2 pending applications·115 citations·filing 1999–2008
80Inventor score
Top patents by PatentIndex Score
6 records- 0188US6630407B2Plasma etching of organic antireflective coatingLAM RES CORP·Filed 2001·Granted Oct 7, 2003·58 cites·20 claims
- 0282US6949460B2Line edge roughness reduction for trench etchLAM RES CORP·Filed 2003·Granted Sep 27, 2005·25 cites·12 claims
- 0368US6540885B1Profile control of oxide trench features for dual damascene applicationsLAM RES CORP·Filed 2001·Granted Apr 1, 2003·14 cites·21 claims
- 0450US6146986ALithographic method for creating damascene metallization layersLAM RES CORP·Filed 1999·Granted Nov 14, 2000·18 cites·52 claims
- 0548US2009296073A1Method to create three-dimensional images of semiconductor structures using a focused ion beam device and a scanning electron microscopeLAM RES CORP·Filed 2008·Application pending·0 cites
- 0646US2005277289A1Line edge roughness reduction for trench etchWAGGANER ERIC·Filed 2005·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Eric Wagganer files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →