Inventor · disambiguated record
Eunsuk Ko
Also filed as: KO EUNSUK
4 granted patents·10 citations·filing 2017–2024
70Inventor score
Technology areasH10P
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0192US12272570B2Systems and methods for metastable activated radical selective strip and etch using dual plenum showerheadLAM RES CORP·Filed 2024·Granted Apr 8, 2025·1 cites·19 claims
- 0291US12272571B2Systems and methods for metastable activated radical selective strip and etch using dual plenum showerheadLAM RES CORP·Filed 2024·Granted Apr 8, 2025·1 cites·19 claims
- 0391US12211709B2Systems and methods for metastable activated radical selective strip and etch using dual plenum showerheadLAM RES CORP·Filed 2023·Granted Jan 28, 2025·1 cites·18 claims
- 0491US11694911B2Systems and methods for metastable activated radical selective strip and etch using dual plenum showerheadLAM RES CORP·Filed 2017·Granted Jul 4, 2023·7 cites·35 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →