Inventor · disambiguated record
Evgeniia Butaeva
Also filed as: BUTAEVA EVGENIIA
3 granted patents·3 pending applications·0 citations·filing 2020–2023
40Inventor score
Files withKLA CORP6
Top patents by PatentIndex Score
6 records- 0157US11262664B2System and method for protecting optics from vacuum ultraviolet lightKLA CORP·Filed 2020·Granted Mar 1, 2022·0 cites·21 claims
- 0255US12510692B2Protection of optical materials of optical components from radiation degradationKLA CORP·Filed 2021·Granted Dec 30, 2025·0 cites·17 claims
- 0355US11715622B2Material recovery systems for optical componentsKLA CORP·Filed 2021·Granted Aug 1, 2023·0 cites·16 claims
- 0453US2024243143A1Boron-Coated Back-Illuminated Image Sensor With Fluoride-Based Anti-Reflection CoatingKLA CORP·Filed 2023·Application pending·0 cites
- 0553US2022316045A1System and method for ion-assisted deposition of optical coatingsKLA CORP·Filed 2022·Application pending·0 cites
- 0642US2022049345A1Fluorine-doped optical materials for optical componentsKLA CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →