Inventor · disambiguated record
Evgenia Kurganova
Also filed as: KURGANOVA EVGENIA
11 granted patents·5 pending applications·13 citations·filing 2018–2024
85Inventor score
Files withASML NETHERLANDS BV16
Top patents by PatentIndex Score
16 records- 0193US11971654B2Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2023·Granted Apr 30, 2024·1 cites·20 claims
- 0292US11287737B2Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2018·Granted Mar 29, 2022·5 cites·20 claims
- 0390US11686997B2Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2022·Granted Jun 27, 2023·1 cites·20 claims
- 0489US11467486B2Graphene pellicle lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Oct 11, 2022·4 cites·21 claims
- 0582US12117726B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2023·Granted Oct 15, 2024·0 cites·20 claims
- 0681US2024302734A1Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0779US11231646B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2018·Granted Jan 25, 2022·1 cites·20 claims
- 0879US2024369920A1Method of manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0976US11947256B2Simultaneous double-side coating of multilayer graphene pellicle by local thermal processingASML NETHERLANDS BV·Filed 2018·Granted Apr 2, 2024·1 cites·22 claims
- 1075US11754918B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2021·Granted Sep 12, 2023·0 cites·24 claims
- 1161US12072620B2Method of manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2019·Granted Aug 27, 2024·0 cites·20 claims
- 1257US12399428B2Method and apparatus for forming a patterned layer of materialASML NETHERLANDS BV·Filed 2021·Granted Aug 26, 2025·0 cites·20 claims
- 1357US2024411233A1Lithographic apparatus and associated methodsASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1447US12325911B2Method and apparatus for forming a patterned layer of materialASML NETHERLANDS BV·Filed 2020·Granted Jun 10, 2025·0 cites·17 claims
- 1543US2023280662A1Method of performing metrology, method of training a machine learning model, method of providing a layer comprising a two-dimensional material, metrology apparatusASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1640US2021079519A1Method and apparatus for forming a patterned layer of materialASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →