Inventor · disambiguated record
Eva A. Shah
Also filed as: SHAH EVA A
7 granted patents·1 pending application·14 citations·filing 2009–2015
77Inventor score
Top patents by PatentIndex Score
8 records- 0182US8575022B2Top corner rounding of damascene wire for insulator crack suppressionCHRISMAN GREGORY S·Filed 2011·Granted Nov 5, 2013·9 cites·22 claims
- 0264US8088690B2CMP methodMCDEVITT THOMAS L·Filed 2009·Granted Jan 3, 2012·3 cites·9 claims
- 0360US8637403B2Locally tailoring chemical mechanical polishing (CMP) polish rate for dielectricsAMOAH YOBA·Filed 2011·Granted Jan 28, 2014·1 cites·20 claims
- 0459US8734665B2Slurry for chemical-mechanical polishing of copper and use thereofBATES GRAHAM M·Filed 2011·Granted May 27, 2014·1 cites·19 claims
- 0550US9708508B2Slurry for chemical-mechanical polishing of metals and use thereofGLOBALFOUNDRIES INC·Filed 2015·Granted Jul 18, 2017·0 cites·16 claims
- 0648US2014035169A1Top corner rounding of damascene wire for insulator crack suppressionIBM·Filed 2013·Application pending·0 cites
- 0747US9057004B2Slurry for chemical-mechanical polishing of metals and use thereofBATES GRAHAM M·Filed 2011·Granted Jun 16, 2015·0 cites·18 claims
- 0836US8877596B2Semiconductor devices with asymmetric halo implantation and method of manufactureBHAGAT DARSHANA N·Filed 2010·Granted Nov 4, 2014·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →