Inventor · disambiguated record
Fabian Haacker
Also filed as: HAACKER FABIAN
4 granted patents·4 pending applications·8 citations·filing 2016–2025
65Inventor score
Files withZEISS CARL SMT GMBH8
Top patents by PatentIndex Score
8 records- 0188US9874819B2Mirror arrayZEISS CARL SMT GMBH·Filed 2016·Granted Jan 23, 2018·4 cites·23 claims
- 0274US9851555B2Optical componentZEISS CARL SMT GMBH·Filed 2016·Granted Dec 26, 2017·3 cites·20 claims
- 0368US10101507B2Mirror deviceZEISS CARL SMT GMBH·Filed 2017·Granted Oct 16, 2018·1 cites·20 claims
- 0468US2025206598A1Apparatus for stress-reduced mounting of mems-based micromirrorsZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0565US2024248408A1Multi-mirror arrayZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0664US2024426603A1Optical device, method for measuring an actual tilt of an optical surface of an optical element, and lithography systemZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0762US2025258437A1Euv multi-mirror arrangementZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0835US10409167B2Method for illuminating an object field of a projection exposure systemZEISS CARL SMT GMBH·Filed 2016·Granted Sep 10, 2019·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →