Inventor · disambiguated record
Fan Tu
Also filed as: TU FAN
0 granted patents·3 pending applications·0 citations·filing 2023–2024
Files withZEISS CARL SMT GMBH3
Top patents by PatentIndex Score
3 records- 0159US2024219844A1Method and apparatus for determining optical properties of deposition materials used for lithographic masksZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0258US2023185180A1Method and apparatus for etching a lithography maskZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0349US2023305386A1Method and apparatus for mask repairZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →