Inventor · disambiguated record
Feng-Chi Chung
Also filed as: CHUNG FENG-CHI
3 granted patents·4 pending applications·3 citations·filing 2001–2019
55Inventor score
Files withUNITED MICROELECTRONICS CORP7
Top patents by PatentIndex Score
7 records- 0175US10935969B2Virtual metrology system and methodUNITED MICROELECTRONICS CORP·Filed 2019·Granted Mar 2, 2021·1 cites·4 claims
- 0269US10261504B2Virtual metrology system and methodUNITED MICROELECTRONICS CORP·Filed 2014·Granted Apr 16, 2019·2 cites·16 claims
- 0343US2016031056A1Method of fault detection and classification (FDC) for improved tool control capabilitiesUNITED MICROELECTRONICS CORP·Filed 2014·Application pending·0 cites
- 0434US10606253B2Method of monitoring processing system for processing substrateUNITED MICROELECTRONICS CORP·Filed 2017·Granted Mar 31, 2020·0 cites·9 claims
- 0533US2002098600A1System and method for status settings of semiconductor equipment with multi chambersUNITED MICROELECTRONICS CORP·Filed 2001·Application pending·0 cites
- 0632US2002095754A1System and method for status settings of semiconductor equipment with multi chambersUNITED MICROELECTRONICS CORP·Filed 2001·Application pending·0 cites
- 0729US2016274570A1Method of virtual metrology using combined modelsUNITED MICROELECTRONICS CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →