Inventor · disambiguated record

Ferry Michael Postma

Also filed as: POSTMA FERRY MICHAEL

1 granted patent·11 citations·filing 2010–2010

38Inventor score

Technology areasH01J

Files withWIELAND MARCO JAN-JACO1

Top patents by PatentIndex Score

1 record

0186US8987677B2Charged particle multi-beamlet lithography system, modulation device, and method of manufacturing thereofWIELAND MARCO JAN-JACO·Filed 2010·Granted Mar 24, 2015·11 cites·29 claims

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