Inventor · disambiguated record
Frank Chang
Also filed as: CHANG FRANK · CHANG FRANK P
7 granted patents·953 citations·filing 1996–1999
91Inventor score
Top patents by PatentIndex Score
7 records- 0198US6258170B1Vaporization and deposition apparatusAPPLIED MATERIALS INC·Filed 1997·Granted Jul 10, 2001·307 cites·47 claims
- 0297US6210485B1Chemical vapor deposition vaporizerAPPLIED MATERIALS INC·Filed 1999·Granted Apr 3, 2001·450 cites·56 claims
- 0387US6358323B1Method and apparatus for improved control of process and purge material in a substrate processing systemAPPLIED MATERIALS INC·Filed 1998·Granted Mar 19, 2002·73 cites·18 claims
- 0480US6082714AVaporization apparatus and processAPPLIED MATERIALS INC·Filed 1998·Granted Jul 4, 2000·32 cites·39 claims
- 0574US6096134ALiquid delivery systemAPPLIED MATERIALS INC·Filed 1998·Granted Aug 1, 2000·23 cites·20 claims
- 0671US6635114B2High temperature filter for CVD apparatusAPPLIED MATERIAL INC·Filed 1999·Granted Oct 21, 2003·34 cites·28 claims
- 0771US5589003AShielded substrate support for processing chamberAPPLIED MATERIALS INC·Filed 1996·Granted Dec 31, 1996·34 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →