Inventor · disambiguated record
Francis Sloan Roberts
Also filed as: ROBERTS FRANCIS SLOAN
4 granted patents·4 pending applications·31 citations·filing 2017–2025
71Inventor score
Files withLAM RES CORP8
Top patents by PatentIndex Score
8 records- 0195US10361092B1Etching features using metal passivationLAM RES CORP·Filed 2018·Granted Jul 23, 2019·22 cites·19 claims
- 0289US10847374B2Method for etching features in a stackLAM RES CORP·Filed 2017·Granted Nov 24, 2020·8 cites·13 claims
- 0381US12266535B2Mask encapsulation to prevent degradation during fabrication of high aspect ratio featuresLAM RES CORP·Filed 2020·Granted Apr 1, 2025·1 cites·20 claims
- 0464US2025191926A1Carbon based depositions used for critical dimension control during high aspect ratio feature etches and for forming protective layersLAM RES CORP·Filed 2025·Application pending·0 cites
- 0560US12249514B2Carbon based depositions used for critical dimension control during high aspect ratio feature etches and for forming protective layersLAM RES CORP·Filed 2020·Granted Mar 11, 2025·0 cites·16 claims
- 0650US2025308894A1Hardmask for high aspect ratio dielectric etch at cryo and elevated temperaturesLAM RES CORP·Filed 2023·Application pending·0 cites
- 0743US2023143057A1Protection of channel layer in three-terminal vertical memory structureLAM RES CORP·Filed 2021·Application pending·0 cites
- 0836US2018286707A1Gas additives for sidewall passivation during high aspect ratio cryogenic etchLAM RES CORP·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →