Inventor · disambiguated record
Fuping Chen
Also filed as: CHEN FUPING
37 granted patents·9 pending applications·19 citations·filing 2011–2025
95Inventor score
Top patents by PatentIndex Score
46 records- 0190US11581205B2Methods and system for cleaning semiconductor wafersACM RESEARCH SHANGHAI INC·Filed 2021·Granted Feb 14, 2023·2 cites·42 claims
- 0286US11141762B2System for cleaning semiconductor wafersACM RESEARCH SHANGHAI INC·Filed 2017·Granted Oct 12, 2021·3 cites·42 claims
- 0382US10297472B2Method and apparatus for cleaning semiconductor waferACM RESEARCH SHANGHAI INC·Filed 2012·Granted May 21, 2019·5 cites·29 claims
- 0481US11911808B2System for cleaning semiconductor wafersACM RESEARCH SHANGHAI INC·Filed 2023·Granted Feb 27, 2024·0 cites·40 claims
- 0578US11629425B2Method and apparatus for uniformly metallization on substrateACM RESEARCH SHANGHAI INC·Filed 2021·Granted Apr 18, 2023·0 cites·19 claims
- 0678US11037804B2Methods and apparatus for cleaning substratesACM RESEARCH SHANGHAI INC·Filed 2016·Granted Jun 15, 2021·2 cites·33 claims
- 0777US12186684B2Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic deviceACM RESEARCH SHANGHAI INC·Filed 2024·Granted Jan 7, 2025·0 cites·13 claims
- 0877US11257667B2Methods and apparatus for cleaning semiconductor wafersACM RESEARCH SHANGHAI INC·Filed 2016·Granted Feb 22, 2022·2 cites·27 claims
- 0976US10907266B2Method and apparatus for uniformly metallization on substrateACM RESEARCH SHANGHAI INC·Filed 2018·Granted Feb 2, 2021·0 cites·14 claims
- 1075US11633765B2System for cleaning semiconductor wafersACM RESEARCH SHANGHAI INC·Filed 2021·Granted Apr 25, 2023·0 cites·14 claims
- 1174US10910244B2Methods and system for cleaning semiconductor wafersACM RESEARCH SHANGHAI INC·Filed 2015·Granted Feb 2, 2021·2 cites·35 claims
- 1273US12494360B2Apparatus and method for cleaning semiconductor wafersACM RESEARCH SHANGHAI INC·Filed 2024·Granted Dec 9, 2025·0 cites·19 claims
- 1372US2025285882A1Method and apparatus for removing particles or photoresist on substratesACM RESEARCH SHANGHAI INC·Filed 2025·Application pending·0 cites
- 1470US11967497B2Methods and apparatus for cleaning semiconductor wafersACM RESEARCH SHANGHAI INC·Filed 2022·Granted Apr 23, 2024·0 cites·16 claims
- 1569US10410906B2Substrate supporting apparatusACM RESEARCH SHANGHAI INC·Filed 2012·Granted Sep 10, 2019·3 cites·13 claims
- 1668US10113244B2Method and apparatus for uniformly metallization on substrateACM RESEARCH SHANGHAI INC·Filed 2013·Granted Oct 30, 2018·0 cites·23 claims
- 1767US11955328B2Method and apparatus for cleaning semiconductor waferACM RESEARCH SHANGHAI INC·Filed 2022·Granted Apr 9, 2024·0 cites·17 claims
- 1866US11925881B2Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic deviceACM RESEARCH SHANGHAI INC·Filed 2021·Granted Mar 12, 2024·0 cites·11 claims
- 1964US11848217B2Methods and apparatus for cleaning substratesACM RESEARCH SHANGHAI INC·Filed 2021·Granted Dec 19, 2023·0 cites·37 claims
- 2064US11638937B2Methods and apparatus for cleaning substratesACM RESEARCH SHANGHAI INC·Filed 2021·Granted May 2, 2023·0 cites·52 claims
- 2160US12111575B2Coater with automatic cleaning function and coater automatic cleaning methodACM RESEARCH SHANGHAI INC·Filed 2020·Granted Oct 8, 2024·0 cites·14 claims
- 2260US11752529B2Method for cleaning semiconductor wafersACM RESEARCH SHANGHAI INC·Filed 2017·Granted Sep 12, 2023·0 cites·23 claims
- 2358US11462423B2Method and apparatus for cleaning semiconductor waferACM RESEARCH SHANGHAI INC·Filed 2019·Granted Oct 4, 2022·0 cites·14 claims
- 2457US12334367B2Method and apparatus for removing particles or photoresist on substratesACM RESEARCH SHANGHAI INC·Filed 2020·Granted Jun 17, 2025·0 cites·32 claims
- 2555US11335550B2Method and apparatus for cleaning semiconductor waferACM RESEARCH SHANGHAI INC·Filed 2017·Granted May 17, 2022·0 cites·32 claims
- 2655US10816901B2Coater with automatic cleaning function and coater automatic cleaning methodACM RESEARCH SHANGHAI INC·Filed 2014·Granted Oct 27, 2020·0 cites·11 claims
- 2754US11876005B2Methods and apparatus for cleaning flip chip assembliesACM RESEARCH SHANGHAI INC·Filed 2019·Granted Jan 16, 2024·0 cites·4 claims
- 2854US2025183059A1Substrate processing apparatusACM RESEARCH SHANGHAI INC·Filed 2023·Application pending·0 cites
- 2954US2025001465A1Substrate processing apparatus and methodACM RESEARCH SHANGHAI INC·Filed 2022·Application pending·0 cites
- 3052US12482697B2Substrate supporting apparatusACM RESEARCH SHANGHAI INC·Filed 2020·Granted Nov 25, 2025·0 cites·10 claims
- 3151US11103898B2Methods and apparatus for cleaning substratesACM RESEARCH SHANGHAI INC·Filed 2016·Granted Aug 31, 2021·0 cites·43 claims
- 3250US12068149B2Apparatus and method for cleaning semiconductor wafersACM RESEARCH SHANGHAI INC·Filed 2018·Granted Aug 20, 2024·0 cites·17 claims
- 3349US11000782B2Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic deviceACM RESEARCH SHANGHAI INC·Filed 2015·Granted May 11, 2021·0 cites·5 claims
- 3446US12100586B2Substrate cleaning method and apparatusACM RESEARCH SHANGHAI INC·Filed 2019·Granted Sep 24, 2024·0 cites·4 claims
- 3546US12062556B2Methods and apparatus for cleaning semiconductor wafersACM RESEARCH SHANGHAI INC·Filed 2018·Granted Aug 13, 2024·0 cites·19 claims
- 3646US11911807B2Method and apparatus for cleaning substratesACM RESEARCH SHANGHAI INC·Filed 2018·Granted Feb 27, 2024·0 cites·11 claims
- 3746US2014224281A1Methods and apparatus for cleaning flip chip assembliesZHANG XIAOYAN·Filed 2011·Application pending·0 cites
- 3846US2024363370A1Drying apparatus and method based on supercritical fluidACM RESEARCH SHANGHAI INC·Filed 2021·Application pending·0 cites
- 3943US11498100B2Apparatus for cleaning semiconductor substratesACM RESEARCH SHANGHAI INC·Filed 2017·Granted Nov 15, 2022·0 cites·20 claims
- 4040US10770315B2Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatusACM RESEARCH SHANGHAI INC·Filed 2015·Granted Sep 8, 2020·0 cites·26 claims
- 4139US11854842B2Substrate heat treatment apparatusACM RESEARCH SHANGHAI INC·Filed 2016·Granted Dec 26, 2023·0 cites·18 claims
- 4239US2021354735A1Telescopic multifunctional working vehicle capable of operating in both directions and evacuating transversely and application method thereofSHANGHAI CIVIL ENG CO LTD OF CREC·Filed 2018·Application pending·0 cites
- 4339US2021035821A1Methods and apparatus for cleaning substratesACM RESEARCH SHANGHAI INC·Filed 2018·Application pending·0 cites
- 4437US2021332533A1Novel track layer for urban track traffic engineering and its construction methodSHANGHAI CIVIL ENG CO LTD OF CREC·Filed 2018·Application pending·0 cites
- 4535US10770335B2Substrate supporting apparatusACM RESEARCH SHANGHAI INC·Filed 2016·Granted Sep 8, 2020·0 cites·10 claims
- 4632US2019252215A1Apparatus and method for cleaning semiconductor wafersACM RESEARCH SHANGHAI INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →