Inventor · disambiguated record
Fumiaki Hayase
Also filed as: HAYASE FUMIAKI
4 granted patents·3 pending applications·12 citations·filing 2011–2024
62Inventor score
Top patents by PatentIndex Score
7 records- 0192US9929008B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Mar 27, 2018·12 cites·19 claims
- 0264US2025003070A1Substrate-processing apparatus and film-forming methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0357US2025019815A1Film-forming method and film-forming apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0452US10053776B2Method of detoxifying exhaust pipe and film forming apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Aug 21, 2018·0 cites·12 claims
- 0549US2018258527A1Film Forming ApparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 0647US10472719B2Nozzle and substrate processing apparatus using sameTOKYO ELECTRON LTD·Filed 2015·Granted Nov 12, 2019·0 cites·19 claims
- 0733US8815112B2Liquid processing method, recording medium having recorded program for executing liquid processing method therein and liquid processing apparatusMIZUNO TSUYOSHI·Filed 2011·Granted Aug 26, 2014·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →