Inventor · disambiguated record
Fumihide Ikeda
Also filed as: IKEDA FUMIHIDE · WATANABE SEIJI
10 granted patents·2 pending applications·756 citations·filing 1992–2009
92Inventor score
Top patents by PatentIndex Score
12 records- 0195US5387265ASemiconductor wafer reaction furnace with wafer transfer meansKOKUSAI ELECTRIC CO LTD·Filed 1992·Granted Feb 7, 1995·408 cites·14 claims
- 0292US5705224AVapor depositing methodKOKUSAI ELECTRIC CO LTD·Filed 1995·Granted Jan 6, 1998·126 cites·14 claims
- 0380US6217663B1Substrate processing apparatus and substrate processing methodKOKUSAI ELECTRIC CO LTD·Filed 1997·Granted Apr 17, 2001·69 cites·58 claims
- 0479US6332927B1Substrate processing apparatusKOKUSAI ELECTRIC CO LTD·Filed 2000·Granted Dec 25, 2001·20 cites·5 claims
- 0569US6462411B1Semiconductor wafer processing apparatus for transferring a wafer mountKOKUSAI ELECTRIC CO LTD·Filed 1998·Granted Oct 8, 2002·40 cites·28 claims
- 0667US5960159AHeat treatment of semiconductor wafers where upper heater directly heats upper wafer in its entirety and lower heater directly heats lower wafer in its entiretyKOKUSAI ELECTRIC CO LTD·Filed 1997·Granted Sep 28, 1999·37 cites·20 claims
- 0760US6139641ASubstrate processing apparatus having a gas heating tubeKOKUSAI ELECTRIC CO LTD·Filed 1997·Granted Oct 31, 2000·21 cites·27 claims
- 0858US6864463B2Substrate processing apparatus and semiconductor device producing methodHITACHI INT ELECTRIC INC·Filed 2002·Granted Mar 8, 2005·6 cites·5 claims
- 0958US6270581B1Wet-oxidation apparatus and wet-oxidation methodKOKUSAI ELECTRIC CO LTD·Filed 1998·Granted Aug 7, 2001·12 cites·27 claims
- 1051US6132553ASubstrate processing apparatusKOKUSAI ELECTRIC CO LTD·Filed 1998·Granted Oct 17, 2000·17 cites·15 claims
- 1148US2010154711A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2009·Application pending·0 cites
- 1241US2001019902A1Wet-oxidation apparatus and wet-oxidation methodKOKUSAI ELECTRIC CO LTD·Filed 2001·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Fumihide Ikeda files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →