Inventor · disambiguated record
Fumihiko Ikeda
Also filed as: IKEDA FUMIHIKO
3 granted patents·12 citations·filing 2007–2017
63Inventor score
Top patents by PatentIndex Score
3 records- 0170US8691481B2Local exposure method and local exposure apparatusIKEDA FUMIHIKO·Filed 2011·Granted Apr 8, 2014·5 cites·8 claims
- 0268US11378728B2Coating processing apparatus, coating processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Jul 5, 2022·2 cites·12 claims
- 0367US8307778B2Coating method and coating unitINAMASU TOSHIFUMI·Filed 2007·Granted Nov 13, 2012·5 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →