Inventor · disambiguated record
Fumihiro Kamimura
Also filed as: KAMIMURA FUMIHIRO
10 granted patents·1 pending application·12 citations·filing 2007–2023
82Inventor score
Technology areasH10P
Top patents by PatentIndex Score
11 records- 0182US11869777B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jan 9, 2024·1 cites·16 claims
- 0282US8475668B2Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored thereinTANAKA HIROSHI·Filed 2010·Granted Jul 2, 2013·6 cites·6 claims
- 0381US11712710B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Aug 1, 2023·3 cites·11 claims
- 0471US12362202B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Jul 15, 2025·0 cites·5 claims
- 0562US9099502B2Chemical-liquid mixing method and chemical-liquid mixing apparatusTANAKA HIROSHI·Filed 2007·Granted Aug 4, 2015·1 cites·8 claims
- 0657US8303723B2Liquid processing apparatus, liquid processing method, and storage mediumMINAMI TERUOMI·Filed 2009·Granted Nov 6, 2012·1 cites·11 claims
- 0753US9415356B1Chemical-liquid mixing method and chemical-liquid mixing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Aug 16, 2016·0 cites·5 claims
- 0851US9339775B2Chemical-liquid mixing method and chemical-liquid mixing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted May 17, 2016·0 cites·5 claims
- 0943US2020070196A1Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1034US9627192B2Substrate processing method, substrate processing apparatus, and computer-readable storage medium stored with substrate processing programTOKYO ELECTRON LTD·Filed 2015·Granted Apr 18, 2017·0 cites·9 claims
- 1132US10811266B2Substrate liquid processing apparatus and method, and computer-readable storage medium storing substrate liquid processing programTOKYO ELECTRON LTD·Filed 2015·Granted Oct 20, 2020·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →