Inventor · disambiguated record
Fumihiko Sakata
Also filed as: SAKATA FUMIHIKO
3 granted patents·178 citations·filing 1996–1998
77Inventor score
Files withEBARA CORP3
Top patents by PatentIndex Score
3 records- 0190US5639388APolishing endpoint detection methodEBARA CORP·Filed 1996·Granted Jun 17, 1997·101 cites·9 claims
- 0275US5830041AMethod and apparatus for determining endpoint during a polishing processEBARA CORP·Filed 1996·Granted Nov 3, 1998·49 cites·10 claims
- 0365US6042454ASystem for detecting the endpoint of the polishing of a semiconductor wafer by a semiconductor wafer polisherEBARA CORP·Filed 1998·Granted Mar 28, 2000·28 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →